JPS59106131A - Sample carrying method - Google Patents

Abstract

PURPOSE:To economize automatic facilities by utilizing a carrier comprising receiving chamber which receives samples, a blower which supplies air and an air conditioning unit which controls air condition and by giving the function to form the purified air space to said carrier itself. CONSTITUTION:A carrier 13 comprises a driver 9 which drives a carrier with a battery power and runs on the rail 8 with the wheels 14 provided at the bottom part and stops by remote control operation or by receiving a signal through a running sensor. An air conditioning unit 10 which intakes the external air through a filter 10a keeps the external air at a constant temperature and humidity. Thereby, the air kept at the constant temperature and humidity is sent to the upper part by the contiguous blower 11 and is then supplied to the sample receiving chamber 12 through a filter 11'. The samples to be processed are received in the sample receiving chamber 12 prepared as a clean room, materials are supplied to each processing apparatuses 1-7 by the automatic material supply mechanism and then such samples are sequentially sent to the next process. With such carrying method, automatic carrying has been more economized as compared with the conventional method. Thereby, productivity can be improved and higher reliability can also be realized.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a transportation method for supplying a sample such as an integrated circuit board between processing devices9, particularly in a clean atmosphere that is not affected by outside air. (b) Background of the technology In semiconductor processing, various treatments performed on integrated circuit boards are performed under severe tube embedding conditions. ” physical and chemical treatments are performed, and a high degree of reliability is required. 1 on the other hand I
c. As the spread of LSI temples to each F industry field expanded, production rapidly increased, and with the M exhibition, the diameter of semiconductor uni/... became larger, and the 4JEz high density As technology advances, automation is becoming an essential condition for semiconductor processing in order to maintain quality.

(c) Conventional technology and problems A typical MO8IC manufacturing process requires 40 to 60 processing steps, and transportation between these processing devices becomes a nuisance. There are two types of transport methods: one is limited to the running area (for example, Bell), and the other is a self-propelled vehicle that freely travels in a designated section. The area must be clean 15-A.

IC factory VL, which has a large number of buildings with various processing facilities and wafers are transported between them, requires a large amount of clean space, and requires air conditioning to create a clean atmosphere. Installation is expensive and increases the cost of the product.

Between processing equipment and f: Transport equipment for supplying semiconductor wafers, which are samples to be processed 11 For example, air belts or conveyors are mechanical, so maintenance is not easy and there is a risk of damage due to falls, etc. be. Konodame economical mystery 1
We are looking forward to a transportation method that will be less reliable in the future.

(d) Object of the Invention The present invention ii In view of the above points, a transport vehicle effective for transporting a sample to be processed between automated processing devices is provided, and the transport vehicle itself is The purpose is to make automated equipment more economical by giving it the ability to create a Miao Kong air [b] rule.

(e) Organization of the invention According to the present invention, the above object is achieved by connecting processing devices 6 to 6.
In the way of transporting the sample to be processed by
Transporting the sample between the processing devices using a transport vehicle equipped with a storage chamber that accommodates the sample, a blower unit that supplies gas to the collection bank, and an air conditioning unit that controls the conditions of the gas. By doing this, we can reach fL.

(f) Embodiments of the Invention - Embodiments of the present invention will be described below with reference to Figures [nI].

Figure 1 shows all the examples of automated processing and equipment connected in the Innoline system. Figure 3 is a block diagram of an automatic transfer car, which is a 191 block diagram of the main line.

In the figure, a sample of q body % is processed, ↓ Ichitani is processed, and the processing equipment 1-1 to 7 is shown. 1 unit installed and each device f;i: 1:4
Connect rail 8 to 1. Is rail 8 fixed? This rail 8'' is shown in Fig. 2, with the flexibility to change it freely according to the layout.
3-Kuchi straight 1 lead reason-13 is 疋I-cho [] I upper 1j:
5 HQ included J1 bow 3, look down at 15 in the middle of the day/-1 self-signed date 4ν, move ~7101 to the nori processing device 1 and c”
f'i' J: I'm angry at what I do.

The payment of 1.13 to send to the white layer 11 is deworming with Yazu battery electric ω! The Hayabusa looks down at the rail 8'' and the second is no misfortune, sound i], runs f on 14, and stops its movement by using the remote control or by receiving the signal from the running sensor. It will be done. The wall control section 10 that takes in outside air through the filter 10a maintains the outside air at a constant temperature and humidity, and sends air upward from the adjacent ventilation section 11 at a constant temperature and humidity, dividing the air into the filter layer 11'. iA is supplied to the food storage chamber 12 through the iA. In this way, the sample storage chamber 12 is constructed as a clean room. The sample to be processed is stored in this sample storage chamber 12, and is bound and reloaded into each device by an automatic material feeder (not shown), and transferred to the next process.
This will be sent to the next library.

By managing the processes 1I-6 of each processing device' almost simultaneously, the ICL processing efficiency is further improved.

By making the sample storage water 12 a clean area in this way, the space for installing each container is reduced to I'! Because it only requires a simple dust-proof room, the air-conditioning equipment is significantly smaller than the conventional one. It has a big effect.

Furthermore, since the lead phase is fully automatic and does not contain any artificial elements, a stable product of Product H can be obtained and the production continuity will be improved.The functions of the automatic vibration 3-wheel 13 are shown in Figure 3. As shown in FIG. ) through the filter layer 11'.

A temperature/humidity adjustment member 19 is provided between the filter 74tt' and the heating coil 17 to maintain constant temperature and humidity.

(!j) Effects of the invention: As explained in the previous section, by using the moving transportation method of the present invention, it is possible to achieve more efficient moving power and transportation than in the past. The layering efficiency is improved and high (m reliability is obtained, i%, etc.), and there is a large tip and vermilion.

[Brief explanation of drawings]

Figure 1 is a complete diagram showing an example of an in-line system for processing each citrus fruit that has been visualized. FIG. 3 is a functional block diagram of an automatic sheet transport vehicle that is an embodiment of the present invention. Figures 1 to 7: Processing device, 8: Rail, 9: Drive section, 10: Air conditioning section, 11: Blower, 12...
・Sample storage room, 13...Automatic bowl transport, 14...Chiwa, 15...Combre noser, 16-N coil, 17
... Heating coil, 18... FA machine, 19... Temperature and humidity al': I III machine O [-]

Claims (1)

[Claims] A method for transporting a sample to be processed by the process between processing apparatuses, comprising a storage chamber for accommodating the sample, a blower section for supplying gas to the storage chamber, and an air conditioning section for discounting the conditions of the gas. 7. A sample transport method characterized in that the sample is transported between the processing apparatuses using a transport vehicle.