JPS5898111A - Laminated filter cartridge made of fluorine-contained resin - Google Patents

Laminated filter cartridge made of fluorine-contained resin

Info

Publication number
JPS5898111A
JPS5898111A JP56197136A JP19713681A JPS5898111A JP S5898111 A JPS5898111 A JP S5898111A JP 56197136 A JP56197136 A JP 56197136A JP 19713681 A JP19713681 A JP 19713681A JP S5898111 A JPS5898111 A JP S5898111A
Authority
JP
Japan
Prior art keywords
cover
bolt
filter unit
contact
boss
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56197136A
Other languages
Japanese (ja)
Other versions
JPS6328653B2 (en
Inventor
Kazuhiro Miyamoto
一弘 宮本
Takashi Yamagishi
山岸 隆
Mitsuhiro Mega
妻鹿 光弘
Setsu Sotozaki
外崎 節
Satoji Kawamura
川村 諭治
Hajime Kawabata
川端 肇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mahle Filter Systems Japan Corp
Tsuchiya Seisakusho KK
Original Assignee
Mahle Filter Systems Japan Corp
Tsuchiya Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mahle Filter Systems Japan Corp, Tsuchiya Seisakusho KK filed Critical Mahle Filter Systems Japan Corp
Priority to JP56197136A priority Critical patent/JPS5898111A/en
Publication of JPS5898111A publication Critical patent/JPS5898111A/en
Publication of JPS6328653B2 publication Critical patent/JPS6328653B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To provide the titled filter cartridge satisfying the necessary conditions of precise filtration, obtained by a method wherein filter units made of a fluorine-contained resin are laminated to be mounted to a cover by threading a bolt through the central passing orifices of said filter unit and the contact part of the cover and a body is fusion-bonded by heating. CONSTITUTION:Disc like filter units 2 are laminated and a central passage 3 piercing through bosses 4 thereof is communicated with said filter unit. A bolt 6 having vertical grooves 6c provided thereto is inserted into the central passage 3 and the seat surface 6d of the bolt head is contacted with the lowermost end surface of the boss part 4 of the obtained laminated body. In addition, the thread part 6b of the bolt 6 is protruded upwardly from the laminated body to be attached to the inner wall of the outlet port provided to the cover 7 by threading and the protruded part 7b of the under surface of the cover 7 is contacted with the uppermost end surface of the boss part 4. The peripheral part 7b of the cover 7 and the opening end 9a of a body 9 are contacted to form a housing 10. The filter unit 2, the bolt 6, the cover 7 and the body 9 are formed from a fluoriine contained resin and each contact parts are fusion- bonded by heating to fixedly adhere the same in liquid-tight manner. A liquid to be filtered entering from an inlet port 11 is filtered by a filter material and a filtrate is collected to the central passage 3 to be sent out from the central outlet through the longitudinal grooves 6c of the bolt 6.

Description

【発明の詳細な説明】 この発明は精密濾過に用いらする積層型フィルタカート
リッジであってその構成部材がすべて弗素樹脂材料で成
るものに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laminated filter cartridge used for precision filtration, all of whose constituent members are made of fluororesin material.

最近IC,LSI  などの電子機器部品を製造する工
程において、エツチング用の強酸や洗浄用の溶剤の清浄
度が特に重要視さnlこルらの液の精密濾過に過するフ
ィルタが要望さnている。
Recently, in the process of manufacturing electronic device parts such as ICs and LSIs, the cleanliness of strong acids for etching and solvents for cleaning has become particularly important, and there is a demand for filters for precision filtration of these liquids. There is.

そしてそのフィルタの材料としては溶剤、強酸等に対す
る耐薬品性、耐熱性等の点で弗素樹脂が適合しうる唯一
の材料であるとさ1ており、P材には従来から′用いら
nでい友が、フィルタの全構成部材を弗素樹脂製とし友
ものは従来は、存在しなかった。こnVi、弗素樹脂が
融点が高く、しかもきわめて高粘度で流動性に乏しく、
さらに高温にすると昇華してしまうこと、溶剤でf#看
させることが〒きないことなどにより、2次的加工が実
用上不可能とされており、従って1次的成形加工によっ
て得た成形品の圧着やねじ螺合等の機械的結合のみが採
用さ几ており、これでは十分な7−ル性が得ら几ないか
らである。そのため従来は例えば実開昭5fi−+ 2
9(116号に示で1でいるようにフィルタの構成部材
に他の樹脂材料やステンレス鋼などが用いら几ており、
前記の強酸や溶剤等のF液中に樹脂等の有機成分や金属
成分が溶出してFlの純度を落とすという不具合があっ
た。
It is said that fluororesin is the only suitable material for the filter in terms of chemical resistance to solvents, strong acids, etc., heat resistance, etc.1, and it has traditionally not been used for P material. A friend made all the constituent members of the filter made of fluororesin, which did not previously exist. This nVi, fluororesin has a high melting point, and has extremely high viscosity and poor fluidity.
Furthermore, secondary processing is considered to be practically impossible due to the fact that it sublimates when heated to a high temperature, and that it is impossible to make f# with a solvent. Therefore, molded products obtained by primary molding This is because only mechanical connections such as crimping and screwing are used, and these do not provide sufficient 7-way properties. Therefore, in the past, for example,
9 (As shown in No. 116, other resin materials, stainless steel, etc. are used in the filter components,
There was a problem in that organic components such as resin and metal components were eluted into the F liquid such as the strong acid and solvent, reducing the purity of Fl.

この発明は上記のような不具合を解消するためになさ几
たものであって、すべての部材が弗素樹脂材料で成る精
密濾過用の積層型フィルタカートリッジを提供するもの
である。 ゛ この発明を実施例によって説明する。第1図に縦断面を
示す積Ni型カートリッジlの内部には、はN円盤状の
フィルタユニット2が中央通孔3′t−設、けたボス4
の端面5を互に接触して富ね合わされており、フィルタ
ユニット2はその外面に固看嘔れたP材2aの内側が支
持体2bの内部通路2cを経て支持体の一部分を構成す
るボス4を貫通する中央通路3に連通ずるようになって
いる。複数のフィルタユニット20績1一体の中央を貫
通する中央通孔3にはボルト6が挿通さ几ており、その
軸部6aの外径は中央通孔3に内接する。そして第2図
(イ)(ロ)に示すように軸部6aねし部6btl−通
して4i#!iの縦m6cが設けられている。またボル
ト頭の座面6dはフィルタユニット槓)一体のボス部最
下端面に接触している。
The present invention has been devised to solve the above-mentioned problems, and provides a laminated filter cartridge for precision filtration in which all members are made of fluororesin material.゛This invention will be explained by examples. Inside the Ni-type cartridge 1, whose longitudinal cross section is shown in FIG.
The end surfaces 5 of the filter unit 2 are placed in contact with each other, and the inside of the P material 2a fixed on the outer surface of the filter unit 2 passes through the internal passage 2c of the support body 2b to form a boss forming a part of the support body. It communicates with a central passage 3 passing through 4. A bolt 6 is inserted through a central through hole 3 that passes through the center of the plurality of filter units 20 and 1, and the outer diameter of the shaft portion 6a is inscribed in the central through hole 3. Then, as shown in FIGS. 2(A) and 2(B), 4i#! A vertical m6c of i is provided. Further, the seat surface 6d of the bolt head is in contact with the lowermost end surface of the boss part of the filter unit.

ボルトのね゛じ部6bはフィルタユニット積層体のボス
部最上端面より上方に突出してカバー7の中央出口孔8
のFE3壁に螺着嘔れ締付けらする。カッ(−7の下面
突出1fIS7 aは前記ボス部最上端面に接触する。
The threaded portion 6b of the bolt protrudes upward from the uppermost end surface of the boss portion of the filter unit stack and connects to the central outlet hole 8 of the cover 7.
FE3 is screwed onto the wall and tightened. The lower surface protrusion 1fIS7a of the cutter (-7) contacts the uppermost end surface of the boss portion.

カバ−7下面の゛周縁部7bはフィルタユニット20績
l一体とボルト6を収容するXコクプ状のボディ9の開
口端9aと接触してハウジング11)を形成する。ボデ
ィ9にはFWの入口孔■が設けらnる。
The peripheral edge 7b of the lower surface of the cover 7 contacts the open end 9a of the X-shaped body 9 that accommodates the filter unit 20 and the bolt 6 to form a housing 11). The body 9 is provided with an FW inlet hole (2).

なお入口孔11はカバー7に設けてもよい。又ノ〜ウジ
ングH1の適宜の個所はエア抜き孔12が必要により設
けらnる。
Note that the inlet hole 11 may be provided in the cover 7. Further, air vent holes 12 are provided at appropriate locations in the housing H1 as necessary.

上記のように形成さ几たフィルタカートリッジは炉材と
支持体とから成るフィルタユニット、ボルト、カバーお
よびボディがすべて弗素樹脂材料製である。そして上記
各接触部すなわち各フィルタユニット2のボス端面5相
互間、ボス端面5とボルト座面6d間、ボス端面5とカ
バー下面突出部78問およびカバー周縁部7bとボディ
開口端9a間は局部加熱により熱111看され液密に固
着されている。
In the filter cartridge formed as described above, the filter unit consisting of the furnace material and the support, the bolt, the cover and the body are all made of fluororesin material. The above-mentioned contact parts, that is, between the boss end faces 5 of each filter unit 2, between the boss end face 5 and the bolt seat surface 6d, between the boss end face 5 and the cover lower surface protrusion 78, and between the cover peripheral edge 7b and the body opening end 9a are localized. By heating, heat 111 is generated and the material is fixed liquid-tightly.

なお炉材と支持体の固着シール部も同様熱融着さ1てい
る。
Note that the fixed seal portion between the furnace material and the support body is also heat-sealed.

ところで、従来は前記のように弗素樹脂相互間の結合に
熱融着は採用されていなかったが、本出願人の研究実験
に・より融点すなわち2711Q−327’Oの閾では
高粘度ながら流動性を持つようになり、分子活動が活発
化しているので接触部は適宜の圧着状態で加熱すれば溶
融接合できるこ、とが判明した。
By the way, as mentioned above, thermal fusion has not been used for bonding between fluororesins, but the applicant's research experiments have shown that at the melting point, that is, 2711Q-327'O, it has high viscosity but fluidity. It was found that the contact area could be melted and bonded by heating it in an appropriate pressure state because the molecular activity became active.

5− そしてその温度や加熱時間などの融層条件は、接触部の
形状、面積加圧力等によって変わり、きわめて許容範囲
が狭いながらも実験的に設定することができる、 このようにして熱融着シールが可能となったことにより
、すべての部材が弗素樹脂から成るフィルタカートリッ
ジが笑現さnたものである。そしてこの熱−着は接触部
に必要な液密性を与える固着シールは可能であるが必ず
しも十分な機械的強度を持つに至らぬ場合があり、また
弗素樹脂材料そのものが剛性に乏しいので、フィルタユ
ニットの積層体はその中央通孔に内接するボルトによっ
て締付けらn軸方向および左右方向の外力に対し前記の
構成を有する積層をフィルタカートリッジは適宜の虐要
個所に入口孔および出口孔を接続さnて便用きnる。P
液は入口孔からハウジング内に入りP材で濾過さ几支持
体内部通1i3を経て中6一 失速孔に集まり、ボルトの縦溝を通ってカバーに設けた
中央出口孔から送出さ几る。そしてこの発明にか\るフ
ィルタカートリッジはその構成部材がすべて弗素樹脂で
成っているから金属成分や他の樹脂成分などを戸液中に
溶出してP液を不純化することがなく、融着部分ハすべ
て炉材の上流側であるから融着の際に微粉やパリが発生
しても清浄側に流出することがなく、耐酸、耐薬品性、
耐熱性等にすぐnたフィルタカートリッジであって、L
SI  の生産などに必要な精密濾過の要件を満足する
ものである。
5- The fusion layer conditions, such as temperature and heating time, vary depending on the shape of the contact part, area pressure, etc., and can be set experimentally, although the tolerance range is extremely narrow. Since sealing became possible, a filter cartridge in which all members were made of fluororesin was realized. Although it is possible to create a fixed seal that provides the necessary liquid tightness to the contact area, this heat bond may not necessarily have sufficient mechanical strength, and the fluororesin material itself has poor rigidity, so it is difficult to use a filter. The laminated body of the unit is tightened by a bolt inscribed in its central through hole.NThe laminated body of the filter cartridge having the above-mentioned structure is connected to the inlet hole and the outlet hole at appropriate locations against external forces in the axial direction and the left and right directions. For convenience. P
The liquid enters the housing from the inlet hole, is filtered by the P material, passes through the internal passage 1i3 of the tank support, collects in the middle 61 stall hole, passes through the vertical groove of the bolt, and is sent out from the central outlet hole provided in the cover. Furthermore, since all of the constituent members of the filter cartridge according to the present invention are made of fluororesin, metal components and other resin components do not elute into the liquid and impure the P liquid, and the fusion Since the part C is all located upstream of the furnace material, even if fine powder or paris is generated during fusion, it will not flow out to the clean side, and has acid resistance, chemical resistance,
A filter cartridge with excellent heat resistance etc., L
This satisfies the precision filtration requirements necessary for SI production.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の積層型フィルタユニッ)+7)縦断面
図、12図(イJ(ロ)−よボjレトの図面て、16゜
2・・・フィルタユニット 3・・・中央通孔4・・・
ボス  6・・・ボルト  7・・・カバー8・・・出
口孔  9・・・ボディ  11・・・入口孔7−6
Fig. 1 is a vertical cross-sectional view of the laminated filter unit of the present invention, and Fig. 12 (Fig. ...
Boss 6... Bolt 7... Cover 8... Outlet hole 9... Body 11... Inlet hole 7-6

Claims (1)

【特許請求の範囲】[Claims] 支持体およびその外面に固着されたP材が共に弗素樹脂
材料で成るはソ円盤状のフィルタユニットの中央ボス部
の端面を互に接触させて複数個積層し、軸部およびねじ
部に複数個の縦溝を有するボルト’i−前記中央ボス部
を貫通する中央通孔に挿通してボルトの軸部外径全中央
通孔に内接さぞ、積層したフィルタユニットのボス部最
下端面とボルドー座面と?接触させ、ボルトねじ部をフ
ィルタユニットのボス部最上端面より突出させてカバー
の出口孔内壁のねじに螺着し、カバー下面とフィルタユ
ニツ)のボス部最上端面とを接触さぞ、カバーの周縁部
には前記積層したフィルタユニットとボルトとを収容す
るコツプ状のボディの開口端を接触させてカバーとボデ
ィとでハウジングを形成させ、ハウジング壁にろ液入口
孔を開設し、前記フィルタユニットとともにボルト、カ
バーおよびボデーを弗素樹脂材料製とし、かつ前記P材
と支持体のシール部、フィルタユニり)相互間のボス端
面接触部、ボス端面とボルト頭座面の接触部、ボス端面
とカバー下面の接触部およびカバーとボディの接触部を
熱融看により液密に固着したことを特徴とする、弗素樹
脂製積層型フィルタカ − ト  リ ッ ジ 。
The support body and the P material fixed to its outer surface are both made of fluororesin material, and a plurality of disc-shaped filter units are stacked with the end faces of the central boss part in contact with each other, and a plurality of P members are attached to the shaft part and the screw part. A bolt 'i' having a vertical groove is inserted into the central through hole passing through the central boss part and inscribed in the central through hole for the entire outer diameter of the bolt's shaft, and the lowermost end surface of the boss part and the Bordeaux seat surface of the stacked filter units are and? Make contact, make the bolt thread part protrude from the top end surface of the boss part of the filter unit, screw it into the screw on the inner wall of the outlet hole of the cover, and bring the bottom surface of the cover and the top end surface of the boss part of the filter unit into contact with each other. The open end of the pot-shaped body housing the stacked filter unit and the bolt is brought into contact with each other to form a housing with the cover and the body, a filtrate inlet hole is opened in the housing wall, and the bolt is inserted together with the filter unit. , the cover and the body are made of a fluororesin material, and the sealing part between the P material and the support, the contact part of the boss end face between each other (the filter unit), the contact part between the boss end face and the bolt head seat surface, the boss end face and the lower surface of the cover. A laminated type filter cartridge made of fluororesin, characterized in that the contact area between the cover and the body and the contact area between the cover and the body are liquid-tightly fixed by thermal fusion.
JP56197136A 1981-12-08 1981-12-08 Laminated filter cartridge made of fluorine-contained resin Granted JPS5898111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56197136A JPS5898111A (en) 1981-12-08 1981-12-08 Laminated filter cartridge made of fluorine-contained resin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56197136A JPS5898111A (en) 1981-12-08 1981-12-08 Laminated filter cartridge made of fluorine-contained resin

Publications (2)

Publication Number Publication Date
JPS5898111A true JPS5898111A (en) 1983-06-10
JPS6328653B2 JPS6328653B2 (en) 1988-06-09

Family

ID=16369346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56197136A Granted JPS5898111A (en) 1981-12-08 1981-12-08 Laminated filter cartridge made of fluorine-contained resin

Country Status (1)

Country Link
JP (1) JPS5898111A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058208A (en) * 1983-09-09 1985-04-04 Kurabo Ind Ltd Filter element and preparation thereof
EP0175432A2 (en) * 1984-09-10 1986-03-26 Hr Textron Inc. All fluorocarbon filter element
JPS6253713A (en) * 1985-05-22 1987-03-09 Kurabo Ind Ltd Circulating filter
US5114508A (en) * 1984-12-24 1992-05-19 Tokuya Miyagi Filter element and its production

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6058208A (en) * 1983-09-09 1985-04-04 Kurabo Ind Ltd Filter element and preparation thereof
JPS6259962B2 (en) * 1983-09-09 1987-12-14 Kurashiki Boseki Kk
EP0175432A2 (en) * 1984-09-10 1986-03-26 Hr Textron Inc. All fluorocarbon filter element
US5114508A (en) * 1984-12-24 1992-05-19 Tokuya Miyagi Filter element and its production
JPS6253713A (en) * 1985-05-22 1987-03-09 Kurabo Ind Ltd Circulating filter

Also Published As

Publication number Publication date
JPS6328653B2 (en) 1988-06-09

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