JPS5890587U - デイスク保持装置 - Google Patents

デイスク保持装置

Info

Publication number
JPS5890587U
JPS5890587U JP18773981U JP18773981U JPS5890587U JP S5890587 U JPS5890587 U JP S5890587U JP 18773981 U JP18773981 U JP 18773981U JP 18773981 U JP18773981 U JP 18773981U JP S5890587 U JPS5890587 U JP S5890587U
Authority
JP
Japan
Prior art keywords
disc
turntable
disk
positioning
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18773981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245320Y2 (US07652168-20100126-C00068.png
Inventor
杉　政雄
真野　義純
Original Assignee
三洋電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三洋電機株式会社 filed Critical 三洋電機株式会社
Priority to JP18773981U priority Critical patent/JPS5890587U/ja
Publication of JPS5890587U publication Critical patent/JPS5890587U/ja
Application granted granted Critical
Publication of JPS6245320Y2 publication Critical patent/JPS6245320Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Holding Or Fastening Of Disk On Rotational Shaft (AREA)
JP18773981U 1981-12-15 1981-12-15 デイスク保持装置 Granted JPS5890587U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18773981U JPS5890587U (ja) 1981-12-15 1981-12-15 デイスク保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18773981U JPS5890587U (ja) 1981-12-15 1981-12-15 デイスク保持装置

Publications (2)

Publication Number Publication Date
JPS5890587U true JPS5890587U (ja) 1983-06-18
JPS6245320Y2 JPS6245320Y2 (US07652168-20100126-C00068.png) 1987-12-03

Family

ID=29990801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18773981U Granted JPS5890587U (ja) 1981-12-15 1981-12-15 デイスク保持装置

Country Status (1)

Country Link
JP (1) JPS5890587U (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230124056A (ko) 2021-02-10 2023-08-24 글로벌웨어퍼스 재팬 가부시키가이샤 에피택셜 실리콘 웨이퍼에 있어서의 결함의 발생 예측방법 및 에피택셜 실리콘 웨이퍼의 제조 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230124056A (ko) 2021-02-10 2023-08-24 글로벌웨어퍼스 재팬 가부시키가이샤 에피택셜 실리콘 웨이퍼에 있어서의 결함의 발생 예측방법 및 에피택셜 실리콘 웨이퍼의 제조 방법

Also Published As

Publication number Publication date
JPS6245320Y2 (US07652168-20100126-C00068.png) 1987-12-03

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