JPS5847209A - 表面形状測定装置 - Google Patents

表面形状測定装置

Info

Publication number
JPS5847209A
JPS5847209A JP14489181A JP14489181A JPS5847209A JP S5847209 A JPS5847209 A JP S5847209A JP 14489181 A JP14489181 A JP 14489181A JP 14489181 A JP14489181 A JP 14489181A JP S5847209 A JPS5847209 A JP S5847209A
Authority
JP
Japan
Prior art keywords
measured
moving table
optical sensor
output
movement amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14489181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123041B2 (ko
Inventor
Hitoshi Takabayashi
高林　均
Toshio Ichikawa
市川　敏夫
Kenji Matsumaru
松丸　憲司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anritsu Corp
Original Assignee
Anritsu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp filed Critical Anritsu Corp
Priority to JP14489181A priority Critical patent/JPS5847209A/ja
Publication of JPS5847209A publication Critical patent/JPS5847209A/ja
Publication of JPH0123041B2 publication Critical patent/JPH0123041B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP14489181A 1981-09-15 1981-09-15 表面形状測定装置 Granted JPS5847209A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14489181A JPS5847209A (ja) 1981-09-15 1981-09-15 表面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14489181A JPS5847209A (ja) 1981-09-15 1981-09-15 表面形状測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63246450A Division JPH0726824B2 (ja) 1988-09-30 1988-09-30 表面形状測定装置

Publications (2)

Publication Number Publication Date
JPS5847209A true JPS5847209A (ja) 1983-03-18
JPH0123041B2 JPH0123041B2 (ko) 1989-04-28

Family

ID=15372750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14489181A Granted JPS5847209A (ja) 1981-09-15 1981-09-15 表面形状測定装置

Country Status (1)

Country Link
JP (1) JPS5847209A (ko)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200109A (ja) * 1984-03-24 1985-10-09 Kanto Jidosha Kogyo Kk 三次元形状の自動測定方法
JPS62235511A (ja) * 1986-03-11 1987-10-15 Kobe Steel Ltd 表面状態検査装置
JPS63163107A (ja) * 1986-12-25 1988-07-06 Toshiba Corp 非接触式真直度測定装置
JPS63191011A (ja) * 1987-02-03 1988-08-08 Mitsubishi Metal Corp 光学式表面粗さ測定装置
JPH01199103A (ja) * 1987-03-13 1989-08-10 Canon Inc 面形状測定装置
JPH03259704A (ja) * 1989-10-20 1991-11-19 Toyota Central Res & Dev Lab Inc ３次元形状計測装置
JPH03264804A (ja) * 1990-03-15 1991-11-26 Anritsu Corp 表面形状測定装置
JPH03269308A (ja) * 1990-03-20 1991-11-29 Anritsu Corp 形状測定装置
JP2002365026A (ja) * 2001-06-07 2002-12-18 Sigma Technos Kk 基板検査装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124944A (en) * 1975-04-25 1976-10-30 Nippon Kogaku Kk <Nikon> Device to detect a tangent line of contour line on a three dimentional object

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124944A (en) * 1975-04-25 1976-10-30 Nippon Kogaku Kk <Nikon> Device to detect a tangent line of contour line on a three dimentional object

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200109A (ja) * 1984-03-24 1985-10-09 Kanto Jidosha Kogyo Kk 三次元形状の自動測定方法
JPS62235511A (ja) * 1986-03-11 1987-10-15 Kobe Steel Ltd 表面状態検査装置
JPS63163107A (ja) * 1986-12-25 1988-07-06 Toshiba Corp 非接触式真直度測定装置
JPS63191011A (ja) * 1987-02-03 1988-08-08 Mitsubishi Metal Corp 光学式表面粗さ測定装置
JPH01199103A (ja) * 1987-03-13 1989-08-10 Canon Inc 面形状測定装置
JPH03259704A (ja) * 1989-10-20 1991-11-19 Toyota Central Res & Dev Lab Inc ３次元形状計測装置
JPH03264804A (ja) * 1990-03-15 1991-11-26 Anritsu Corp 表面形状測定装置
JPH03269308A (ja) * 1990-03-20 1991-11-29 Anritsu Corp 形状測定装置
JP2002365026A (ja) * 2001-06-07 2002-12-18 Sigma Technos Kk 基板検査装置

Also Published As

Publication number Publication date
JPH0123041B2 (ko) 1989-04-28

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