JPS5843226Y2 - 素子検査装置 - Google Patents

素子検査装置

Info

Publication number
JPS5843226Y2
JPS5843226Y2 JP16268277U JP16268277U JPS5843226Y2 JP S5843226 Y2 JPS5843226 Y2 JP S5843226Y2 JP 16268277 U JP16268277 U JP 16268277U JP 16268277 U JP16268277 U JP 16268277U JP S5843226 Y2 JPS5843226 Y2 JP S5843226Y2
Authority
JP
Japan
Prior art keywords
section
inspection
punching
classification
sample detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16268277U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5488271U (enrdf_load_stackoverflow
Inventor
信雄 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP16268277U priority Critical patent/JPS5843226Y2/ja
Publication of JPS5488271U publication Critical patent/JPS5488271U/ja
Application granted granted Critical
Publication of JPS5843226Y2 publication Critical patent/JPS5843226Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Control Of Indicators Other Than Cathode Ray Tubes (AREA)
JP16268277U 1977-12-02 1977-12-02 素子検査装置 Expired JPS5843226Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16268277U JPS5843226Y2 (ja) 1977-12-02 1977-12-02 素子検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16268277U JPS5843226Y2 (ja) 1977-12-02 1977-12-02 素子検査装置

Publications (2)

Publication Number Publication Date
JPS5488271U JPS5488271U (enrdf_load_stackoverflow) 1979-06-22
JPS5843226Y2 true JPS5843226Y2 (ja) 1983-09-30

Family

ID=29158641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16268277U Expired JPS5843226Y2 (ja) 1977-12-02 1977-12-02 素子検査装置

Country Status (1)

Country Link
JP (1) JPS5843226Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825243A (ja) * 1981-08-07 1983-02-15 Hitachi Ltd 半導体ウェーハ処理方法

Also Published As

Publication number Publication date
JPS5488271U (enrdf_load_stackoverflow) 1979-06-22

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