JPS5834346A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置

Info

Publication number
JPS5834346A
JPS5834346A JP13388381A JP13388381A JPS5834346A JP S5834346 A JPS5834346 A JP S5834346A JP 13388381 A JP13388381 A JP 13388381A JP 13388381 A JP13388381 A JP 13388381A JP S5834346 A JPS5834346 A JP S5834346A
Authority
JP
Japan
Prior art keywords
inspected
scanning
light
pattern
defect inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13388381A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64657B2 (enrdf_load_stackoverflow
Inventor
Mitsuhito Kamei
光仁 亀井
Toshiro Nakajima
利郎 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13388381A priority Critical patent/JPS5834346A/ja
Publication of JPS5834346A publication Critical patent/JPS5834346A/ja
Publication of JPS64657B2 publication Critical patent/JPS64657B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP13388381A 1981-08-26 1981-08-26 表面欠陥検査装置 Granted JPS5834346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13388381A JPS5834346A (ja) 1981-08-26 1981-08-26 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13388381A JPS5834346A (ja) 1981-08-26 1981-08-26 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5834346A true JPS5834346A (ja) 1983-02-28
JPS64657B2 JPS64657B2 (enrdf_load_stackoverflow) 1989-01-09

Family

ID=15115313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13388381A Granted JPS5834346A (ja) 1981-08-26 1981-08-26 表面欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5834346A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152681A (ja) * 1988-11-25 1990-06-12 Tanaka Kikinzoku Kogyo Kk 刷子接点の梱包ケース

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03125838U (enrdf_load_stackoverflow) * 1990-03-31 1991-12-19

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327087A (en) * 1976-08-26 1978-03-13 Toshiba Corp Flaw detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327087A (en) * 1976-08-26 1978-03-13 Toshiba Corp Flaw detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02152681A (ja) * 1988-11-25 1990-06-12 Tanaka Kikinzoku Kogyo Kk 刷子接点の梱包ケース

Also Published As

Publication number Publication date
JPS64657B2 (enrdf_load_stackoverflow) 1989-01-09

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