JPS58208613A - Length measuring device - Google Patents

Length measuring device

Info

Publication number
JPS58208613A
JPS58208613A JP9090382A JP9090382A JPS58208613A JP S58208613 A JPS58208613 A JP S58208613A JP 9090382 A JP9090382 A JP 9090382A JP 9090382 A JP9090382 A JP 9090382A JP S58208613 A JPS58208613 A JP S58208613A
Authority
JP
Japan
Prior art keywords
head
oil
scale
pressure
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9090382A
Other languages
Japanese (ja)
Other versions
JPH0129241B2 (en
Inventor
Kenji Uchida
賢治 内田
Hiroshi Yonemoto
米本 宏
Nobuyuki Suzuki
信之 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Magnescale Inc
Original Assignee
Sony Magnescale Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Magnescale Inc filed Critical Sony Magnescale Inc
Priority to JP9090382A priority Critical patent/JPS58208613A/en
Publication of JPS58208613A publication Critical patent/JPS58208613A/en
Publication of JPH0129241B2 publication Critical patent/JPH0129241B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • G01D5/34753Carriages; Driving or coupling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To improve water resistant property and dust resistant property in a simple constitution, by supplying a gas including oil to the inside of a cabinet of a device from outside, and making the inner pressure of the device higher than the outer pressure. CONSTITUTION:A length measuring device is constituted by a head assembly 41 comprising a slider 42, a head attaching plate 43, a head supporting member 44, and the like, a detecting head 45, a scale 46, and the like. Then, a groove 50, wherein a lead wire 49 for the detecting head 45 is contained, and holes 51 and 51' are provided in the slider 42. Pipes 52 and 52' are attached to the device. When high pressure air contg. oil in a sprayed state is supplied from the pipe 52, the inner pressure of a case 47 becomes higher than the outer pressure through the groove 50 and the pipe 52. At the same time, lubricating oil is always supplied to the scale 46. Therefore, water resisting property and dust resisting property are improved in a simple constitution. The device is suitable for process measuring which is required for the automation of machining operation.

Description

【発明の詳細な説明】 不覚明は副尺装置、特にその耐塵性及び耐水性に侵れた
副尺装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vernier device, particularly a vernier device whose dust and water resistance has been compromised.

機械加工の自動化の進展に伴ない、各種の副尺装置を用
いたインプロセス計測、或いはインタープロセス計測の
要求か高まっている。
With the advancement of automation in machining, the demand for in-process measurement or inter-process measurement using various vernier devices is increasing.

しかしその反面、研削性及び切削性を高めるために、各
種のl+s性、溶解性の研削液、切削液等が使用される
ようになっている。従って副尺装置はインプロセス計測
又はインタープロセス計測の埃場においては、流れ落ち
る切削液、飛散する研削勅願、或いは幼11」液飛抹等
の存在する悪い環境条件で使用せざるを得ない。しかる
に従来の副尺装置にも各種の防塵及び防滴対策が施され
てはいるか、万全なものではな(、研削液、切削油、粉
塵等の侵入により、その機能か損われる欠点があった。
However, on the other hand, in order to improve grindability and machinability, various types of l+s, soluble grinding fluids, cutting fluids, etc. are being used. Therefore, the vernier device must be used in a dusty environment for in-process measurement or inter-process measurement, under adverse environmental conditions such as falling cutting fluid, splattering grinding fluid, or liquid spray. However, although conventional vernier devices are equipped with various dust-proof and drip-proof measures, they are not perfect (they have the disadvantage that their functionality can be impaired by the intrusion of grinding fluid, cutting oil, dust, etc.). .

例えは、その多(は電解性切削液の侵入による検出ヘッ
ド伝送系の電気的短絡、溶鱗性切削敢の浸漬による検出
ヘッドからのリード線の腐蝕、断線等である。
Examples include electrical short circuits in the detection head transmission system due to intrusion of electrolytic cutting fluid, corrosion and disconnection of lead wires from the detection head due to immersion in scaly cutting fluid, etc.

そこでかかる従来技術の欠点を解決するために、副尺装
置内に外部より気体を供給することにより、副尺装置の
内圧を外圧より高くし耐水性及び耐塵性を持たせて、上
述の如き悪い環境下でも、機械21D工のインプロセス
計測或いはインタープロセス計測に好適な副尺装置か提
案されている。
Therefore, in order to solve the drawbacks of the prior art, the internal pressure of the vernier device is made higher than the external pressure by supplying gas from the outside into the vernier device, making it water resistant and dust resistant. A vernier device suitable for in-process measurement or inter-process measurement of 21D machines has been proposed even under environmental conditions.

第1図はそのようなプランジャ形測尺装置の一例で、同
図ににいて、lは測定スヒンドル、2はこれに連動する
磁気スケールで、筐体3内で該スケール2と検出ヘッド
4との間の相対移動量をスケール信号として検出し、ケ
ーブル5を介して外部に取出すようKなっており、その
構造自体は公知であるから、詳細説明は省略する。
FIG. 1 shows an example of such a plunger-type length measuring device. The amount of relative movement between them is detected as a scale signal and taken out to the outside via a cable 5. Since the structure itself is well known, detailed explanation will be omitted.

またこの副尺装置の主たる開口部はスピンドル軸受部6
とケーブルクランプ部6で、スピンドル@受部5にはオ
イルシールリング或いはOリング7等で、またケーブル
クランプ部6にはプンシング8で夫々成る程度のシール
を施しである。
The main opening of this vernier device is the spindle bearing part 6.
and the cable clamp part 6, the spindle@receiving part 5 is sealed with an oil seal ring or an O-ring 7, and the cable clamp part 6 is sealed with a punching 8.

さて筐体3には吸気口9を設けて、所定圧の空気をチュ
ーブ10を弁して筐体3内に供給する。この空気の圧力
は少なくとも副尺装置の使用環境の外気圧より渦(設定
する。
Now, the housing 3 is provided with an intake port 9, and air at a predetermined pressure is supplied into the housing 3 by valving the tube 10. The pressure of this air is set at least higher than the external pressure of the environment in which the vernier device is used.

なお、筐体3内の検出ヘッド保持ill、或いはスピン
ドル軸受部パ(バネ受)12等には、夫々連通穴13.
14を設けて、筐体3内の内圧を均等にすることが望ま
しい。
Note that there are communication holes 13. in the detection head holding ill in the housing 3, the spindle bearing part (spring bearing) 12, etc., respectively.
14 to equalize the internal pressure within the housing 3.

このようKしてプランジャ型測尺装置の筐体内の内圧を
外圧に対して高めることにより外部からの油、水、砂塵
等の投入を効果的に防ぐことかできる。
By increasing the internal pressure within the housing of the plunger type measuring device relative to the external pressure in this way, it is possible to effectively prevent oil, water, dust, etc. from entering from the outside.

第2夕1は同様にシリンダti測尺装置の一例で、筐体
A内に固設した磁気スケール21と、筐体A内に対して
移動目在な筺体Bの一端に固定した検出ヘッドたとの相
対称#JJ′jiをスケール信号として検出しケーブル
nを介して外部に取り出すようになっている。この装置
の王たる開口部は筐体AとBとの嵌合824であり、こ
の部分にOリング或いはオイルシール1)フグ5等であ
る程度のシールを施し℃ある。
Similarly, the second example 1 is an example of a cylinder ti measuring device, which includes a magnetic scale 21 fixedly installed in a housing A, and a detection head fixed at one end of a housing B that is movable with respect to the inside of the housing A. The phase symmetry #JJ'ji of is detected as a scale signal and taken out to the outside via cable n. The main opening of this device is the fitting 824 between the casings A and B, and this part is sealed to some extent with an O-ring or an oil seal 1) with a puffer 5 or the like.

さて、この場合も、筐体A(又はB)K吸気口部を設け
て、外部より所定圧の気体をチューブZを介して筐体内
に供給する。なお、筐体A内のシリンダロンド3には連
通穴あを形成し、筐体A。
Now, in this case as well, the housing A (or B) is provided with an inlet portion K, and gas at a predetermined pressure is supplied from the outside into the housing via the tube Z. Incidentally, a communicating hole is formed in the cylinder ring 3 in the case A.

H7相対移動に伴なって各容積内の気圧を均等化するよ
うになっている。
The air pressure within each volume is equalized with the relative movement of H7.

上述したように構成すれは、シール部5を通して筐体内
の気体か外部へ若干リークするが、筐体内の内圧が外圧
に対して高(維持されることによ  ゛す、外部から水
、油、粉塵等の浸入を防ぐことができる。
With the configuration described above, some gas inside the housing leaks to the outside through the seal portion 5, but since the internal pressure inside the housing is maintained at a high level relative to the external pressure, water, oil, It can prevent the infiltration of dust, etc.

第3図は更にリニア型ディジタル式測尺装置の一51i
で、ケース31内に固設した磁気スケール32と、ヘッ
ド城付板33に保持されている検出ヘンド諷との相対移
動によりスケール信号を検出するように構成されている
。ケース開口部にはゴム、スポンジ、金輌シート等の弾
性体で形成されたシール部材あが設けられており、ある
程度のシール効果がある。
Figure 3 further shows a linear digital measuring device.
The scale signal is detected by the relative movement between a magnetic scale 32 fixedly installed in the case 31 and a detection head held on a head mounting plate 33. A seal member made of an elastic material such as rubber, sponge, metal sheet, etc. is provided at the opening of the case, and has a certain degree of sealing effect.

ケース31 Kは適当な位置に、吸気口37が設けら゛
れており、外部よりチューブ38を介して所定圧の気体
がケース内に供給される。従ってケースの内圧はシール
部を介して若干気体のリークがあるものの、外圧より高
くなっているので、外部からの水、油、粉塵等の浸入を
防ぐことができる。
The case 31K is provided with an intake port 37 at a suitable position, and gas at a predetermined pressure is supplied into the case from the outside through a tube 38. Therefore, although there is some gas leakage through the seal, the internal pressure of the case is higher than the external pressure, so water, oil, dust, etc. can be prevented from entering from the outside.

本kA明は上述した副尺装置を更に改良し、装置証体内
に油分を含む高圧気体を供給するように構成することに
より、スケールへの潤滑油の供給方式な細部化し、更に
防塵効果の向上を計ることな目的とする。
This product further improves the vernier device described above, and by configuring it to supply high-pressure gas containing oil into the device proof body, the system for supplying lubricating oil to the scale has been refined, and the dust-proofing effect has been further improved. The purpose is to measure.

以下図面に示す実産例を径間して本発明を曲明すると、
第4図(al、 (b)において、41はヘッド7ノセ
ンブリて、スライダー4z、ヘッド取付板43及びヘッ
ド支持部材44等力・ら成る。
The present invention is illustrated by referring to the actual examples shown in the drawings below.
In FIGS. 4(al) and 4(b), reference numeral 41 indicates a head 7 assembly, which includes a slider 4z, a head mounting plate 43, a head support member 44, etc.

スライダー42はヘッド城付板43上に載置され、該−
ラド取句&43はヘッド支持部打射を弁して検出ヘッド
45を支持しており、該ヘッドに対し相対移動するスク
ール46がこれらの部材を貫通している。
The slider 42 is placed on the head plate 43, and the -
The rad handle &43 supports the detection head 45 by controlling the head support section, and a school 46 that moves relative to the head passes through these members.

また検出ヘッド45及びスケール46はケース47内に
収容されており、ヘッド取伺板43とケース開口部48
間には増白なシール部材48か光填され、ある程度のシ
ール効果を得ている。
Further, the detection head 45 and the scale 46 are housed in a case 47, and the head receiving plate 43 and the case opening 48 are housed in a case 47.
A whitening sealing member 48 is optically filled in between to obtain a certain degree of sealing effect.

Mjシて通常、スライダー42には検出ヘッド藝のリー
ドfih49を挿通する溝(資)が形成されている。そ
こで実tsM汐りではこの溝を高圧気体の流通路に利用
する。
Normally, the slider 42 is formed with a groove into which the lead fih 49 of the detection head is inserted. Therefore, in the real tsM Shio, this groove is used as a flow path for high-pressure gas.

卸ち、スライダー社に前記溝(資)に連動する大51゜
51′を穿設し、夫々の穴の一口にパイプ52.52を
取付ける。
Then, drill a large 51° 51' hole in the slider that connects to the groove, and attach a pipe 52 and 52 to each hole.

なおスライター42とへンド取付板砺との間隙には、ン
ール刑プ工どを光j14すると、気体のリークが減少し
ん来的である。
It is recommended that a gas leak be applied to the gap between the slitter 42 and the hend mounting plate to reduce gas leakage.

以上のような構成に?いて、パイプ52より霧状の油を
言む^圧全A等の児体を供給すれば、溝間及びパイプ5
2を弁してケース47の内圧は外圧より筒<1よる。し
かもスケール46には同時に潤滑油も亀時供縮できる。
Is it configured like the above? If a mist of oil such as pressure A is supplied from the pipe 52, between the grooves and the pipe 5.
2, the internal pressure of the case 47 depends on the cylinder < 1 from the external pressure. Furthermore, the lubricating oil can also be supplied to the scale 46 at the same time.

またこの油はスケール面の乾燥75に:シノぐ効果もあ
る。
This oil also has a dehydrating effect on scale surfaces.

な2第5図1al 、 (b) ic示す91」<、パ
ルプ協、駒′より直販ケース内に油分を含む気体を供給
するようにしてもよい。
It is also possible to supply a gas containing oil into the direct sales case from the Pulp Association, Koma'.

以上数例し1こように杢児明によれは比較的・簡易な構
成により耐水及び両層性に優れ、機械加工の自動化に貿
求さiするづンプロセス計測、メンタ−プロセスb1測
寺に幻退な抑」尺装置を提供すること・  ′D)でき
る。
From the above several examples, 1. Thus, Mokuji Akira has excellent water resistance and double-layered properties due to its relatively simple structure, and is highly sought after for the automation of machining. D) It is possible to provide an effective deterrent device.

なK、本発明は帥遮したタイプの測尺装装置だけテアz
<、回転型スケール、ロータリエンコーダ、電気マイク
ロメータ等の穫々の装置に適用でき、同様の作用効果を
得られる。また、特に装置内への油分を営む気体の供鞄
をスライダーの溝を利用する場合はリード線域出口Mに
対する防塵に効果釣である。
However, the present invention can only be used for tearing the measuring device of the type that is shielded.
It can be applied to various devices such as rotary scales, rotary encoders, and electric micrometers, and similar effects can be obtained. In addition, especially when the groove of the slider is used to carry a gas containing oil into the device, it is effective in preventing dust from the lead line area outlet M.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はブランジー1−型側及装置の一例を示す概略図
、第2図及び第3図は大々シリンダ型及びリニア型沖j
尺装置の一例を示す概略図、第4図(a)。 (b)は本発明の一実漉例を示す概略図、第5図(a)
。 (b)は本発明の他の実施例を示す概腎図である。 1・・・測定スヒンドル、2・・・スケール、3・・・
筐体、4°・・検出ヘッド、9・・・吸気口、1o・・
・チューブ。 特 許 出 願 人   ソニーマグネスケール株式会
社代理人 弁理士  水 1)武 三 部第4図 (0) IP;5図(0) 手続補正書 昭和57年11月1日 特許庁ij=酉 着杉和夫 殿 1 事件の表示 昭和57年t#許願 第090903号2 発明の名称 副尺装置 3 補正をする者 事件との関係 特許出願人 住所 名 称 ソニーマグネスケール休式会社4代理人〒10
5 住 所  東京都港区芝3丁目2番14号芝三丁目ビル
電話(03)455−8746番 氏 名  (7238)弁理士 永 1)武三部5 補
正の対象 明細書の発明の畦細なり1.E!Aの−及び−面6 補
正の内容 口)不願明a書第2頁第9行乃至第12行「った。 ・・・である。」馨「る。」に補正する。 (2) 第4図1alt別紙のように補正する。
Fig. 1 is a schematic diagram showing an example of the Blangy 1-type side and equipment, and Figs. 2 and 3 are large cylinder type and linear type offshore j.
FIG. 4(a) is a schematic diagram showing an example of a scale device. (b) is a schematic diagram showing a practical example of the present invention; FIG. 5(a)
. (b) is a schematic renal diagram showing another embodiment of the present invention. 1...Measuring scale, 2...Scale, 3...
Housing, 4°...Detection head, 9...Intake port, 1o...
·tube. Patent Applicant Sony Magnescale Co., Ltd. Agent Patent Attorney Wed 1) Take Part 3 Figure 4 (0) IP; Figure 5 (0) Procedural Amendment November 1, 1980 Patent Office ij = Tori Chikusugi Mr. Kazuo 1 Indication of the case 1982 t# Grant No. 090903 2 Name of the invention Vernier device 3 Relationship to the case by the person making the amendment Patent applicant Address Name Name Sony Magnescale Closed Company 4 Agent 〒10
5 Address: Shiba 3-chome Building, 3-2-14 Shiba, Minato-ku, Tokyo Telephone: (03) 455-8746 Name: (7238) Patent Attorney Nagai 1) Takeshi Department 5 Details of the invention in the specification subject to amendment Nari 1. E! - and - aspects 6 of A - Contents of the amendment (Opening) Page 2, lines 9 to 12 of Letter of Disapproval: ``It. ... desu.'' is amended to ``ru.''. (2) Correct as shown in the attached sheet in Figure 4, 1alt.

Claims (2)

【特許請求の範囲】[Claims] (1)装置筐体内に外部より油分を含む気体を供梠し、
その内圧を外圧より高くなるように構成したことを66
とする副尺装置。
(1) Supplying oil-containing gas from the outside into the device housing,
66 that the internal pressure is configured to be higher than the external pressure.
A vernier device.
(2)前記油分を含む気体かヘッド7ノセンブリ同の気
体流路及びパイプを弁してヘッド取付板の両部からスゲ
ールに供給されるように構成したことを特徴とする特許
請求の範囲第1項記載の副尺装置。
(2) The oil-containing gas is configured to be supplied to the scale from both sides of the head mounting plate by valving the gas flow path and pipe of the head 7 assembly. Vernier device as described in section.
JP9090382A 1982-05-28 1982-05-28 Length measuring device Granted JPS58208613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9090382A JPS58208613A (en) 1982-05-28 1982-05-28 Length measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9090382A JPS58208613A (en) 1982-05-28 1982-05-28 Length measuring device

Publications (2)

Publication Number Publication Date
JPS58208613A true JPS58208613A (en) 1983-12-05
JPH0129241B2 JPH0129241B2 (en) 1989-06-08

Family

ID=14011357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9090382A Granted JPS58208613A (en) 1982-05-28 1982-05-28 Length measuring device

Country Status (1)

Country Link
JP (1) JPS58208613A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182212U (en) * 1984-11-02 1986-05-31
EP0297251A2 (en) * 1987-07-03 1989-01-04 Dr. Johannes Heidenhain GmbH Encapsulated position measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182212U (en) * 1984-11-02 1986-05-31
EP0297251A2 (en) * 1987-07-03 1989-01-04 Dr. Johannes Heidenhain GmbH Encapsulated position measuring device

Also Published As

Publication number Publication date
JPH0129241B2 (en) 1989-06-08

Similar Documents

Publication Publication Date Title
US3789297A (en) Leak detector
KR930002810A (en) Pressure measuring device
US4447960A (en) Plug gauge for checking dimensions of bores of mechanical parts
CA1199864A (en) Method and apparatus for monitoring the corrosive effects of well fluids
EA009913B1 (en) System and method for measuring electric current in a pipeline
JPS58208613A (en) Length measuring device
US6568266B1 (en) Pressure housing for in-water pressure based systems
JPH02106224A (en) Wire discharge working device
JPS58173420A (en) Length measuring device
KR101328290B1 (en) Measurement instrument
CA1155215A (en) System detecting particles carried by a fluid flow
US3616415A (en) Axial corrosion rate probe
US2773236A (en) Apparatus for detecting ingress and egress of fluid in a borehole
US4535633A (en) Method and apparatus for the protection of analyzers and other sensitive components from soiling and corrosion
CN112240244A (en) Self-sealing plug structure capable of adsorbing ferromagnetic metal chips
CN217716561U (en) Input type liquid level monitoring device and protective assembly
CN215572675U (en) Waterproof magnetostrictive displacement sensor
CN214745020U (en) Natural gas leakage alarm device
CN220206767U (en) Electromagnetic flowmeter
CN208588496U (en) Hydrostatic sensor anti-disturbance device and hydrostatic sensor
CN210426666U (en) Plug-in flowmeter
AU2002242937B2 (en) Pressure housing for in-water pressure based systems
US20240191363A1 (en) Cathodic Protection Unit
CN218330427U (en) Anti-vibration pressure gauge detection device
CN214404702U (en) Pressure regulating type multifunctional water pump control valve