JPS58204374A - 基板の絶縁導通判定装置 - Google Patents

基板の絶縁導通判定装置

Info

Publication number
JPS58204374A
JPS58204374A JP57087164A JP8716482A JPS58204374A JP S58204374 A JPS58204374 A JP S58204374A JP 57087164 A JP57087164 A JP 57087164A JP 8716482 A JP8716482 A JP 8716482A JP S58204374 A JPS58204374 A JP S58204374A
Authority
JP
Japan
Prior art keywords
substrate
capacitance
signal line
data
electrostatic capacity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57087164A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0317106B2 (https=
Inventor
Yasushi Suzuki
康司 鈴木
Teizo Sekiya
関屋　禎三
Akira Ogawa
明 小川
Eiichi Shirakawa
白川　栄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57087164A priority Critical patent/JPS58204374A/ja
Publication of JPS58204374A publication Critical patent/JPS58204374A/ja
Publication of JPH0317106B2 publication Critical patent/JPH0317106B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP57087164A 1982-05-22 1982-05-22 基板の絶縁導通判定装置 Granted JPS58204374A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57087164A JPS58204374A (ja) 1982-05-22 1982-05-22 基板の絶縁導通判定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57087164A JPS58204374A (ja) 1982-05-22 1982-05-22 基板の絶縁導通判定装置

Publications (2)

Publication Number Publication Date
JPS58204374A true JPS58204374A (ja) 1983-11-29
JPH0317106B2 JPH0317106B2 (https=) 1991-03-07

Family

ID=13907343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57087164A Granted JPS58204374A (ja) 1982-05-22 1982-05-22 基板の絶縁導通判定装置

Country Status (1)

Country Link
JP (1) JPS58204374A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001330579A (ja) * 2000-05-23 2001-11-30 Nec Ibaraki Ltd パターン検査方法及びパターン検査装置及び記録媒体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001330579A (ja) * 2000-05-23 2001-11-30 Nec Ibaraki Ltd パターン検査方法及びパターン検査装置及び記録媒体

Also Published As

Publication number Publication date
JPH0317106B2 (https=) 1991-03-07

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