JPS5820118B2 - - Google Patents

Info

Publication number
JPS5820118B2
JPS5820118B2 JP12922075A JP12922075A JPS5820118B2 JP S5820118 B2 JPS5820118 B2 JP S5820118B2 JP 12922075 A JP12922075 A JP 12922075A JP 12922075 A JP12922075 A JP 12922075A JP S5820118 B2 JPS5820118 B2 JP S5820118B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12922075A
Other versions
JPS5254899A (en )
Inventor
Osami Okada
Taro Momo
Michio Ootsuka
Katsumi Tokikuchi
Keizo Suzuki
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

JP12922075A 1975-10-29 1975-10-29 Expired JPS5820118B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29

Publications (2)

Publication Number Publication Date
JPS5254899A true JPS5254899A (en) 1977-05-04
JPS5820118B2 true JPS5820118B2 (en) 1983-04-21

Family

ID=15004100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12922075A Expired JPS5820118B2 (en) 1975-10-29 1975-10-29

Country Status (1)

Country Link
JP (1) JPS5820118B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321879Y2 (en) * 1981-08-04 1988-06-16
JPH0616384B2 (en) * 1984-06-11 1994-03-02 日本電信電話株式会社 Microwave ion source

Also Published As

Publication number Publication date Type
JPS5254899A (en) 1977-05-04 application

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