JPS5820118B2 - - Google Patents

Info

Publication number
JPS5820118B2
JPS5820118B2 JP12922075A JP12922075A JPS5820118B2 JP S5820118 B2 JPS5820118 B2 JP S5820118B2 JP 12922075 A JP12922075 A JP 12922075A JP 12922075 A JP12922075 A JP 12922075A JP S5820118 B2 JPS5820118 B2 JP S5820118B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12922075A
Other versions
JPS5254899A (en
Inventor
Osami Okada
Taro Momo
Michio Ootsuka
Katsumi Tokikuchi
Keizo Suzuki
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12922075A priority Critical patent/JPS5820118B2/ja
Publication of JPS5254899A publication Critical patent/JPS5254899A/en
Publication of JPS5820118B2 publication Critical patent/JPS5820118B2/ja
Application status is Expired legal-status Critical

Links

JP12922075A 1975-10-29 1975-10-29 Expired JPS5820118B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12922075A JPS5820118B2 (en) 1975-10-29 1975-10-29

Publications (2)

Publication Number Publication Date
JPS5254899A JPS5254899A (en) 1977-05-04
JPS5820118B2 true JPS5820118B2 (en) 1983-04-21

Family

ID=15004100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12922075A Expired JPS5820118B2 (en) 1975-10-29 1975-10-29

Country Status (1)

Country Link
JP (1) JPS5820118B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6321879Y2 (en) * 1981-08-04 1988-06-16
JPH0616384B2 (en) * 1984-06-11 1994-03-02 日本電信電話株式会社 Microwave ion source

Also Published As

Publication number Publication date
JPS5254899A (en) 1977-05-04

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