JPS58190042A - 薄膜半導体装置 - Google Patents

薄膜半導体装置

Info

Publication number
JPS58190042A
JPS58190042A JP57072420A JP7242082A JPS58190042A JP S58190042 A JPS58190042 A JP S58190042A JP 57072420 A JP57072420 A JP 57072420A JP 7242082 A JP7242082 A JP 7242082A JP S58190042 A JPS58190042 A JP S58190042A
Authority
JP
Japan
Prior art keywords
film
wiring
deposited
thin film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57072420A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352228B2 (enrdf_load_html_response
Inventor
Koji Suzuki
幸治 鈴木
Mitsushi Ikeda
光志 池田
Toshio Aoki
寿男 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57072420A priority Critical patent/JPS58190042A/ja
Publication of JPS58190042A publication Critical patent/JPS58190042A/ja
Publication of JPH0352228B2 publication Critical patent/JPH0352228B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP57072420A 1982-04-28 1982-04-28 薄膜半導体装置 Granted JPS58190042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57072420A JPS58190042A (ja) 1982-04-28 1982-04-28 薄膜半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57072420A JPS58190042A (ja) 1982-04-28 1982-04-28 薄膜半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP7207357A Division JP2602007B2 (ja) 1995-07-24 1995-07-24 薄膜半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58190042A true JPS58190042A (ja) 1983-11-05
JPH0352228B2 JPH0352228B2 (enrdf_load_html_response) 1991-08-09

Family

ID=13488769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57072420A Granted JPS58190042A (ja) 1982-04-28 1982-04-28 薄膜半導体装置

Country Status (1)

Country Link
JP (1) JPS58190042A (enrdf_load_html_response)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58192090A (ja) * 1982-05-06 1983-11-09 セイコーエプソン株式会社 マトリツクスアレ−
JPS596578A (ja) * 1982-07-02 1984-01-13 Sanyo Electric Co Ltd 電界効果型トランジスタアレイ
JPS599941A (ja) * 1982-07-08 1984-01-19 Matsushita Electric Ind Co Ltd 薄膜半導体装置の製造方法
JPS60189265A (ja) * 1984-03-08 1985-09-26 Matsushita Electric Ind Co Ltd 薄膜電界効果型半導体装置
JPS61116872A (ja) * 1984-11-13 1986-06-04 Sharp Corp 薄膜トランジスタ
JPH01134342A (ja) * 1987-11-19 1989-05-26 Sharp Corp アクティブマトリクス基板
US5627088A (en) * 1986-01-24 1997-05-06 Canon Kabushiki Kaisha Method of making a device having a TFT and a capacitor
US7189998B2 (en) * 1998-10-29 2007-03-13 Samsung Electronics Co., Ltd. Thin film transistor array panel for a liquid crystal display

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154289A (en) * 1978-05-26 1979-12-05 Matsushita Electric Ind Co Ltd Manufacture of thin-film transistor array
JPS56140321A (en) * 1980-04-01 1981-11-02 Canon Inc Display device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154289A (en) * 1978-05-26 1979-12-05 Matsushita Electric Ind Co Ltd Manufacture of thin-film transistor array
JPS56140321A (en) * 1980-04-01 1981-11-02 Canon Inc Display device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58192090A (ja) * 1982-05-06 1983-11-09 セイコーエプソン株式会社 マトリツクスアレ−
JPS596578A (ja) * 1982-07-02 1984-01-13 Sanyo Electric Co Ltd 電界効果型トランジスタアレイ
JPS599941A (ja) * 1982-07-08 1984-01-19 Matsushita Electric Ind Co Ltd 薄膜半導体装置の製造方法
JPS60189265A (ja) * 1984-03-08 1985-09-26 Matsushita Electric Ind Co Ltd 薄膜電界効果型半導体装置
JPS61116872A (ja) * 1984-11-13 1986-06-04 Sharp Corp 薄膜トランジスタ
US5627088A (en) * 1986-01-24 1997-05-06 Canon Kabushiki Kaisha Method of making a device having a TFT and a capacitor
JPH01134342A (ja) * 1987-11-19 1989-05-26 Sharp Corp アクティブマトリクス基板
US7189998B2 (en) * 1998-10-29 2007-03-13 Samsung Electronics Co., Ltd. Thin film transistor array panel for a liquid crystal display

Also Published As

Publication number Publication date
JPH0352228B2 (enrdf_load_html_response) 1991-08-09

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