JPS58179011A - 弾性表面波装置 - Google Patents
弾性表面波装置Info
- Publication number
- JPS58179011A JPS58179011A JP6200182A JP6200182A JPS58179011A JP S58179011 A JPS58179011 A JP S58179011A JP 6200182 A JP6200182 A JP 6200182A JP 6200182 A JP6200182 A JP 6200182A JP S58179011 A JPS58179011 A JP S58179011A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- wave device
- piezoelectric
- acoustic wave
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 238000000605 extraction Methods 0.000 claims description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 5
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000644 propagated effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 240000001548 Camellia japonica Species 0.000 description 1
- 230000018199 S phase Effects 0.000 description 1
- 241000270666 Testudines Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000018597 common camellia Nutrition 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6200182A JPS58179011A (ja) | 1982-04-14 | 1982-04-14 | 弾性表面波装置 |
| US06/482,755 US4521711A (en) | 1982-04-14 | 1983-04-07 | Unidirectional transducer for a surface-acoustic-wave device and a method of making same |
| DE3312726A DE3312726C2 (de) | 1982-04-14 | 1983-04-08 | Mit akustischen Oberflächenwellen arbeitendes Bauelement |
| GB08309962A GB2120892B (en) | 1982-04-14 | 1983-04-13 | Surface-acoustic-wave device unidirectional transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6200182A JPS58179011A (ja) | 1982-04-14 | 1982-04-14 | 弾性表面波装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58179011A true JPS58179011A (ja) | 1983-10-20 |
| JPH0356011B2 JPH0356011B2 (enrdf_load_stackoverflow) | 1991-08-27 |
Family
ID=13187476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6200182A Granted JPS58179011A (ja) | 1982-04-14 | 1982-04-14 | 弾性表面波装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58179011A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5762002A (en) * | 1980-10-01 | 1982-04-14 | Ricoh Co Ltd | Reflecting mirror device |
-
1982
- 1982-04-14 JP JP6200182A patent/JPS58179011A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5762002A (en) * | 1980-10-01 | 1982-04-14 | Ricoh Co Ltd | Reflecting mirror device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356011B2 (enrdf_load_stackoverflow) | 1991-08-27 |
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