JPS58168571U - 液相エピタキシヤル成長用装置 - Google Patents

液相エピタキシヤル成長用装置

Info

Publication number
JPS58168571U
JPS58168571U JP6356782U JP6356782U JPS58168571U JP S58168571 U JPS58168571 U JP S58168571U JP 6356782 U JP6356782 U JP 6356782U JP 6356782 U JP6356782 U JP 6356782U JP S58168571 U JPS58168571 U JP S58168571U
Authority
JP
Japan
Prior art keywords
substrate
liquid phase
epitaxial growth
phase epitaxial
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6356782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS621258Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
川野　英夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP6356782U priority Critical patent/JPS58168571U/ja
Publication of JPS58168571U publication Critical patent/JPS58168571U/ja
Application granted granted Critical
Publication of JPS621258Y2 publication Critical patent/JPS621258Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP6356782U 1982-04-30 1982-04-30 液相エピタキシヤル成長用装置 Granted JPS58168571U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6356782U JPS58168571U (ja) 1982-04-30 1982-04-30 液相エピタキシヤル成長用装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6356782U JPS58168571U (ja) 1982-04-30 1982-04-30 液相エピタキシヤル成長用装置

Publications (2)

Publication Number Publication Date
JPS58168571U true JPS58168571U (ja) 1983-11-10
JPS621258Y2 JPS621258Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-13

Family

ID=30073667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6356782U Granted JPS58168571U (ja) 1982-04-30 1982-04-30 液相エピタキシヤル成長用装置

Country Status (1)

Country Link
JP (1) JPS58168571U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117616A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd 液相エピタキシヤル成長方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117616A (ja) * 1983-11-30 1985-06-25 Fujitsu Ltd 液相エピタキシヤル成長方法

Also Published As

Publication number Publication date
JPS621258Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-13

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