JPS5816066A - 真空メツキ装置 - Google Patents

真空メツキ装置

Info

Publication number
JPS5816066A
JPS5816066A JP56114731A JP11473181A JPS5816066A JP S5816066 A JPS5816066 A JP S5816066A JP 56114731 A JP56114731 A JP 56114731A JP 11473181 A JP11473181 A JP 11473181A JP S5816066 A JPS5816066 A JP S5816066A
Authority
JP
Japan
Prior art keywords
cover
plated
vacuum
crucible
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56114731A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6124464B2 (enrdf_load_stackoverflow
Inventor
Yoichi Onishi
陽一 大西
Takashi Suzuki
隆 鈴木
Kei Ookubo
大久保　絅
Takeshi Shiraishi
白石　健
Yasuo Iijima
飯島　康男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56114731A priority Critical patent/JPS5816066A/ja
Publication of JPS5816066A publication Critical patent/JPS5816066A/ja
Publication of JPS6124464B2 publication Critical patent/JPS6124464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP56114731A 1981-07-22 1981-07-22 真空メツキ装置 Granted JPS5816066A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56114731A JPS5816066A (ja) 1981-07-22 1981-07-22 真空メツキ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56114731A JPS5816066A (ja) 1981-07-22 1981-07-22 真空メツキ装置

Publications (2)

Publication Number Publication Date
JPS5816066A true JPS5816066A (ja) 1983-01-29
JPS6124464B2 JPS6124464B2 (enrdf_load_stackoverflow) 1986-06-11

Family

ID=14645211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56114731A Granted JPS5816066A (ja) 1981-07-22 1981-07-22 真空メツキ装置

Country Status (1)

Country Link
JP (1) JPS5816066A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62256164A (ja) * 1986-04-30 1987-11-07 Akada Denki Shoji Kk せり分配装置
JP2008109884A (ja) * 2006-10-30 2008-05-15 Daiwa Seiko Inc 魚釣用スピニングリール
US9930875B2 (en) 2014-09-30 2018-04-03 Globeride, Inc. Anti-reverse device for fishing spinning reel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62256164A (ja) * 1986-04-30 1987-11-07 Akada Denki Shoji Kk せり分配装置
JP2008109884A (ja) * 2006-10-30 2008-05-15 Daiwa Seiko Inc 魚釣用スピニングリール
US9930875B2 (en) 2014-09-30 2018-04-03 Globeride, Inc. Anti-reverse device for fishing spinning reel

Also Published As

Publication number Publication date
JPS6124464B2 (enrdf_load_stackoverflow) 1986-06-11

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