JPS58156578U - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS58156578U
JPS58156578U JP5005882U JP5005882U JPS58156578U JP S58156578 U JPS58156578 U JP S58156578U JP 5005882 U JP5005882 U JP 5005882U JP 5005882 U JP5005882 U JP 5005882U JP S58156578 U JPS58156578 U JP S58156578U
Authority
JP
Japan
Prior art keywords
cleaning equipment
chamber
discharge port
port
polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5005882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229105Y2 (enrdf_load_stackoverflow
Inventor
金治 安藤
五十嵐　英男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP5005882U priority Critical patent/JPS58156578U/ja
Publication of JPS58156578U publication Critical patent/JPS58156578U/ja
Application granted granted Critical
Publication of JPS6229105Y2 publication Critical patent/JPS6229105Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Auxiliary Devices For Machine Tools (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP5005882U 1982-04-07 1982-04-07 洗浄装置 Granted JPS58156578U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5005882U JPS58156578U (ja) 1982-04-07 1982-04-07 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5005882U JPS58156578U (ja) 1982-04-07 1982-04-07 洗浄装置

Publications (2)

Publication Number Publication Date
JPS58156578U true JPS58156578U (ja) 1983-10-19
JPS6229105Y2 JPS6229105Y2 (enrdf_load_stackoverflow) 1987-07-25

Family

ID=30060869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5005882U Granted JPS58156578U (ja) 1982-04-07 1982-04-07 洗浄装置

Country Status (1)

Country Link
JP (1) JPS58156578U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146783U (enrdf_load_stackoverflow) * 1975-05-19 1976-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146783U (enrdf_load_stackoverflow) * 1975-05-19 1976-11-25

Also Published As

Publication number Publication date
JPS6229105Y2 (enrdf_load_stackoverflow) 1987-07-25

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