JPS58155732A - キヤリア寿命測定装置 - Google Patents

キヤリア寿命測定装置

Info

Publication number
JPS58155732A
JPS58155732A JP57038014A JP3801482A JPS58155732A JP S58155732 A JPS58155732 A JP S58155732A JP 57038014 A JP57038014 A JP 57038014A JP 3801482 A JP3801482 A JP 3801482A JP S58155732 A JPS58155732 A JP S58155732A
Authority
JP
Japan
Prior art keywords
junction
semiconductor sample
sample
current
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57038014A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544187B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Noriaki Honma
本間　則秋
Tadasuke Munakata
忠輔 棟方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57038014A priority Critical patent/JPS58155732A/ja
Publication of JPS58155732A publication Critical patent/JPS58155732A/ja
Publication of JPH0544187B2 publication Critical patent/JPH0544187B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57038014A 1982-03-12 1982-03-12 キヤリア寿命測定装置 Granted JPS58155732A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57038014A JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57038014A JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Publications (2)

Publication Number Publication Date
JPS58155732A true JPS58155732A (ja) 1983-09-16
JPH0544187B2 JPH0544187B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-05

Family

ID=12513714

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57038014A Granted JPS58155732A (ja) 1982-03-12 1982-03-12 キヤリア寿命測定装置

Country Status (1)

Country Link
JP (1) JPS58155732A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5543334A (en) * 1993-12-15 1996-08-06 Kabushiki Kaisha Toshiba Method of screening semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856437U (ja) * 1981-10-09 1983-04-16 株式会社日立製作所 半導体接合特性測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856437U (ja) * 1981-10-09 1983-04-16 株式会社日立製作所 半導体接合特性測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5543334A (en) * 1993-12-15 1996-08-06 Kabushiki Kaisha Toshiba Method of screening semiconductor device

Also Published As

Publication number Publication date
JPH0544187B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-05

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