JPS58129640U - 半導体処理容器の自動開閉装置 - Google Patents

半導体処理容器の自動開閉装置

Info

Publication number
JPS58129640U
JPS58129640U JP2593482U JP2593482U JPS58129640U JP S58129640 U JPS58129640 U JP S58129640U JP 2593482 U JP2593482 U JP 2593482U JP 2593482 U JP2593482 U JP 2593482U JP S58129640 U JPS58129640 U JP S58129640U
Authority
JP
Japan
Prior art keywords
semiconductor processing
closing device
automatic opening
processing container
processing containers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2593482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141234Y2 (enEXAMPLES
Inventor
治夫 伊藤
Original Assignee
テルサ−ムコ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by テルサ−ムコ株式会社 filed Critical テルサ−ムコ株式会社
Priority to JP2593482U priority Critical patent/JPS58129640U/ja
Publication of JPS58129640U publication Critical patent/JPS58129640U/ja
Application granted granted Critical
Publication of JPS6141234Y2 publication Critical patent/JPS6141234Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Housings, Linings, Walls, And Ceilings (AREA)
JP2593482U 1982-02-25 1982-02-25 半導体処理容器の自動開閉装置 Granted JPS58129640U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2593482U JPS58129640U (ja) 1982-02-25 1982-02-25 半導体処理容器の自動開閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2593482U JPS58129640U (ja) 1982-02-25 1982-02-25 半導体処理容器の自動開閉装置

Publications (2)

Publication Number Publication Date
JPS58129640U true JPS58129640U (ja) 1983-09-02
JPS6141234Y2 JPS6141234Y2 (enEXAMPLES) 1986-11-25

Family

ID=30037889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2593482U Granted JPS58129640U (ja) 1982-02-25 1982-02-25 半導体処理容器の自動開閉装置

Country Status (1)

Country Link
JP (1) JPS58129640U (enEXAMPLES)

Also Published As

Publication number Publication date
JPS6141234Y2 (enEXAMPLES) 1986-11-25

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