JPS58119601U - ダイアフラム装置 - Google Patents

ダイアフラム装置

Info

Publication number
JPS58119601U
JPS58119601U JP1680382U JP1680382U JPS58119601U JP S58119601 U JPS58119601 U JP S58119601U JP 1680382 U JP1680382 U JP 1680382U JP 1680382 U JP1680382 U JP 1680382U JP S58119601 U JPS58119601 U JP S58119601U
Authority
JP
Japan
Prior art keywords
casing
atmospheric
diaphragm
atmospheric chamber
passage hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1680382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6233123Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
荒川　利弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1680382U priority Critical patent/JPS58119601U/ja
Publication of JPS58119601U publication Critical patent/JPS58119601U/ja
Application granted granted Critical
Publication of JPS6233123Y2 publication Critical patent/JPS6233123Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
JP1680382U 1982-02-08 1982-02-08 ダイアフラム装置 Granted JPS58119601U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1680382U JPS58119601U (ja) 1982-02-08 1982-02-08 ダイアフラム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1680382U JPS58119601U (ja) 1982-02-08 1982-02-08 ダイアフラム装置

Publications (2)

Publication Number Publication Date
JPS58119601U true JPS58119601U (ja) 1983-08-15
JPS6233123Y2 JPS6233123Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-25

Family

ID=30029154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1680382U Granted JPS58119601U (ja) 1982-02-08 1982-02-08 ダイアフラム装置

Country Status (1)

Country Link
JP (1) JPS58119601U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336695U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-09-06 1978-03-31
JPS5487383U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-12-02 1979-06-20
JPS55152802U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-04-20 1980-11-04

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336695U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-09-06 1978-03-31
JPS5487383U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-12-02 1979-06-20
JPS55152802U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-04-20 1980-11-04

Also Published As

Publication number Publication date
JPS6233123Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-25

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