JPS58107563U - マイクロ波放電光源装置 - Google Patents

マイクロ波放電光源装置

Info

Publication number
JPS58107563U
JPS58107563U JP479282U JP479282U JPS58107563U JP S58107563 U JPS58107563 U JP S58107563U JP 479282 U JP479282 U JP 479282U JP 479282 U JP479282 U JP 479282U JP S58107563 U JPS58107563 U JP S58107563U
Authority
JP
Japan
Prior art keywords
microwave
light source
source device
discharge light
conversion element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP479282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326881Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
憲治 吉沢
勲 正田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP479282U priority Critical patent/JPS58107563U/ja
Publication of JPS58107563U publication Critical patent/JPS58107563U/ja
Application granted granted Critical
Publication of JPS6326881Y2 publication Critical patent/JPS6326881Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP479282U 1982-01-18 1982-01-18 マイクロ波放電光源装置 Granted JPS58107563U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP479282U JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP479282U JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Publications (2)

Publication Number Publication Date
JPS58107563U true JPS58107563U (ja) 1983-07-22
JPS6326881Y2 JPS6326881Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-21

Family

ID=30017622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP479282U Granted JPS58107563U (ja) 1982-01-18 1982-01-18 マイクロ波放電光源装置

Country Status (1)

Country Link
JP (1) JPS58107563U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009140673A (ja) * 2007-12-05 2009-06-25 Japan Atomic Energy Agency ビーム終端方法及びビーム終端装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3872349A (en) * 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009140673A (ja) * 2007-12-05 2009-06-25 Japan Atomic Energy Agency ビーム終端方法及びビーム終端装置

Also Published As

Publication number Publication date
JPS6326881Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-21

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