JPS58102452A - 電界放射型電子銃 - Google Patents

電界放射型電子銃

Info

Publication number
JPS58102452A
JPS58102452A JP56202081A JP20208181A JPS58102452A JP S58102452 A JPS58102452 A JP S58102452A JP 56202081 A JP56202081 A JP 56202081A JP 20208181 A JP20208181 A JP 20208181A JP S58102452 A JPS58102452 A JP S58102452A
Authority
JP
Japan
Prior art keywords
emitter
flushing
power
field emission
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56202081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340016B2 (enrdf_load_stackoverflow
Inventor
Nobuaki Tamura
田村　伸昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56202081A priority Critical patent/JPS58102452A/ja
Publication of JPS58102452A publication Critical patent/JPS58102452A/ja
Publication of JPS6340016B2 publication Critical patent/JPS6340016B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/242—Filament heating power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56202081A 1981-12-14 1981-12-14 電界放射型電子銃 Granted JPS58102452A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56202081A JPS58102452A (ja) 1981-12-14 1981-12-14 電界放射型電子銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56202081A JPS58102452A (ja) 1981-12-14 1981-12-14 電界放射型電子銃

Publications (2)

Publication Number Publication Date
JPS58102452A true JPS58102452A (ja) 1983-06-18
JPS6340016B2 JPS6340016B2 (enrdf_load_stackoverflow) 1988-08-09

Family

ID=16451640

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56202081A Granted JPS58102452A (ja) 1981-12-14 1981-12-14 電界放射型電子銃

Country Status (1)

Country Link
JP (1) JPS58102452A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223246A (ja) * 1982-06-21 1983-12-24 Hitachi Ltd 電界放射電子銃
JPS60225345A (ja) * 1984-04-20 1985-11-09 Hitachi Ltd 電界放射方法およびそれに用いる電子線装置
JPH05266844A (ja) * 1992-03-19 1993-10-15 Hitachi Ltd 電子顕微鏡及びその使用方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259762A (ja) * 1992-03-10 1993-10-08 Yokowo Co Ltd 高周波回路構造

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931264A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-20
JPS55155453A (en) * 1979-05-22 1980-12-03 Jeol Ltd Electric field emission type electron gun

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4931264A (enrdf_load_stackoverflow) * 1972-07-21 1974-03-20
JPS55155453A (en) * 1979-05-22 1980-12-03 Jeol Ltd Electric field emission type electron gun

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58223246A (ja) * 1982-06-21 1983-12-24 Hitachi Ltd 電界放射電子銃
JPS60225345A (ja) * 1984-04-20 1985-11-09 Hitachi Ltd 電界放射方法およびそれに用いる電子線装置
JPH05266844A (ja) * 1992-03-19 1993-10-15 Hitachi Ltd 電子顕微鏡及びその使用方法

Also Published As

Publication number Publication date
JPS6340016B2 (enrdf_load_stackoverflow) 1988-08-09

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