JPS58100397A - Plasma unit - Google Patents

Plasma unit

Info

Publication number
JPS58100397A
JPS58100397A JP56197733A JP19773381A JPS58100397A JP S58100397 A JPS58100397 A JP S58100397A JP 56197733 A JP56197733 A JP 56197733A JP 19773381 A JP19773381 A JP 19773381A JP S58100397 A JPS58100397 A JP S58100397A
Authority
JP
Japan
Prior art keywords
plasma unit
plasma
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56197733A
Inventor
Katsuhiro Kageyama
Original Assignee
Tokyo Shibaura Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co filed Critical Tokyo Shibaura Electric Co
Priority to JP56197733A priority Critical patent/JPS58100397A/en
Priority claimed from US06/423,293 external-priority patent/US4584160A/en
Publication of JPS58100397A publication Critical patent/JPS58100397A/en
Application status is Pending legal-status Critical

Links

JP56197733A 1981-12-10 1981-12-10 Plasma unit Pending JPS58100397A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56197733A JPS58100397A (en) 1981-12-10 1981-12-10 Plasma unit

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP56197733A JPS58100397A (en) 1981-12-10 1981-12-10 Plasma unit
US06/423,293 US4584160A (en) 1981-09-30 1982-09-24 Plasma devices
DE19823268687 DE3268687D1 (en) 1981-09-30 1982-09-29 Plasma devices
EP19820109022 EP0075953B1 (en) 1981-09-30 1982-09-29 Plasma devices

Publications (1)

Publication Number Publication Date
JPS58100397A true JPS58100397A (en) 1983-06-15

Family

ID=16379433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56197733A Pending JPS58100397A (en) 1981-12-10 1981-12-10 Plasma unit

Country Status (1)

Country Link
JP (1) JPS58100397A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63503167A (en) * 1985-10-07 1988-11-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63503167A (en) * 1985-10-07 1988-11-17

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