JPS5797464A - Measuring device for semiconductor element - Google Patents

Abstract

PURPOSE:To make preparations through simple manual operation and to perform measurement under stable conditions by holding the measurement in readiness by pushing up a mounting table body by utilizing a roll after mounting a semiconductor element, whose electric characteristics are to be measured, on the mounting table body temporarily. CONSTITUTION:A mounting table 17 on which a semiconductor element 1 whose electric characteristics are to be measured is mounted has a recessed groove wherein the external lead-out wire 3 of the element 1 is held and is fixed to a mounting table body 18. This main body 18 is held on a fixed shaft 11 through a slidably supported bearing 19 and, while the reverse surface of the main body 18 is in contact with the roll 15 of an operating arm 14, moves up and down through the rotation of the operating arm 14. The main body 18 is placed at a lower-limit position and after the element is mounted temporarily while its external lead-out wire 3 is alignes to the recessed groove of the mounting table 17, the operating arm 16 is rotated to push up the main body 18 through the roll 15 to an upper-limit position. In this state, the external lead-out wire 3 comes into contact with a contact piece 21 to perform measurement by an electric characteristic measuring instrument.