JPS5794323A - Treating method for waste gas of cvd apparatus - Google Patents
Treating method for waste gas of cvd apparatusInfo
- Publication number
- JPS5794323A JPS5794323A JP55169684A JP16968480A JPS5794323A JP S5794323 A JPS5794323 A JP S5794323A JP 55169684 A JP55169684 A JP 55169684A JP 16968480 A JP16968480 A JP 16968480A JP S5794323 A JPS5794323 A JP S5794323A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- silane
- liquid
- washing
- waste gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55169684A JPS5794323A (en) | 1980-12-03 | 1980-12-03 | Treating method for waste gas of cvd apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55169684A JPS5794323A (en) | 1980-12-03 | 1980-12-03 | Treating method for waste gas of cvd apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5794323A true JPS5794323A (en) | 1982-06-11 |
Family
ID=15890983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55169684A Pending JPS5794323A (en) | 1980-12-03 | 1980-12-03 | Treating method for waste gas of cvd apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5794323A (ja) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60175522A (ja) * | 1984-02-23 | 1985-09-09 | World Giken:Kk | 半導体生産工程中の廃ガス乾式処理組成物 |
JPS6142321A (ja) * | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
JPS61115129U (ja) * | 1984-12-28 | 1986-07-21 | ||
JPS63214321A (ja) * | 1987-02-28 | 1988-09-07 | Koujiyundo Silicon Kk | 珪素化合物を含むガスの処理方法 |
JPH03178318A (ja) * | 1989-12-04 | 1991-08-02 | Iwatani Internatl Corp | 水素化物系廃ガスの湿式除害方法 |
JPH03178317A (ja) * | 1989-12-04 | 1991-08-02 | Iwatani Internatl Corp | 水素化物系廃ガスの湿式除害方法 |
FR2727692A1 (fr) * | 1994-12-05 | 1996-06-07 | Europ Propulsion | Dispositif d'extraction de gaz pour four d'infiltration ou depot chimique en phase vapeur dans une installation de fabrication de pieces en materiau composite |
JP2013039521A (ja) * | 2011-08-15 | 2013-02-28 | Taiyo Nippon Sanso Corp | ガス処理方法、ガス処理装置、微粉末の形成方法及び微粉末形成装置 |
JP2013099719A (ja) * | 2011-11-08 | 2013-05-23 | Nt Corp | 有害ガスの無害化処理方法およびその方法を実施するためのスクラバー |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
-
1980
- 1980-12-03 JP JP55169684A patent/JPS5794323A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6331252B2 (ja) * | 1984-02-23 | 1988-06-23 | Waarudo Giken Kk | |
JPS60175522A (ja) * | 1984-02-23 | 1985-09-09 | World Giken:Kk | 半導体生産工程中の廃ガス乾式処理組成物 |
JPS6142321A (ja) * | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
JPH0331085B2 (ja) * | 1984-08-06 | 1991-05-02 | Sonii Kk | |
JPH0344252Y2 (ja) * | 1984-12-28 | 1991-09-18 | ||
JPS61115129U (ja) * | 1984-12-28 | 1986-07-21 | ||
JPS63214321A (ja) * | 1987-02-28 | 1988-09-07 | Koujiyundo Silicon Kk | 珪素化合物を含むガスの処理方法 |
JPH03178318A (ja) * | 1989-12-04 | 1991-08-02 | Iwatani Internatl Corp | 水素化物系廃ガスの湿式除害方法 |
JPH03178317A (ja) * | 1989-12-04 | 1991-08-02 | Iwatani Internatl Corp | 水素化物系廃ガスの湿式除害方法 |
FR2727692A1 (fr) * | 1994-12-05 | 1996-06-07 | Europ Propulsion | Dispositif d'extraction de gaz pour four d'infiltration ou depot chimique en phase vapeur dans une installation de fabrication de pieces en materiau composite |
WO1996017972A1 (fr) * | 1994-12-05 | 1996-06-13 | Societe Europeenne De Propulsion | Dispositif d'extraction de gaz |
JP2013039521A (ja) * | 2011-08-15 | 2013-02-28 | Taiyo Nippon Sanso Corp | ガス処理方法、ガス処理装置、微粉末の形成方法及び微粉末形成装置 |
JP2013099719A (ja) * | 2011-11-08 | 2013-05-23 | Nt Corp | 有害ガスの無害化処理方法およびその方法を実施するためのスクラバー |
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