JPS5766856U - - Google Patents
Info
- Publication number
- JPS5766856U JPS5766856U JP14275680U JP14275680U JPS5766856U JP S5766856 U JPS5766856 U JP S5766856U JP 14275680 U JP14275680 U JP 14275680U JP 14275680 U JP14275680 U JP 14275680U JP S5766856 U JPS5766856 U JP S5766856U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275680U JPS5766856U (en:Method) | 1980-10-08 | 1980-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14275680U JPS5766856U (en:Method) | 1980-10-08 | 1980-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5766856U true JPS5766856U (en:Method) | 1982-04-21 |
Family
ID=29502534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14275680U Pending JPS5766856U (en:Method) | 1980-10-08 | 1980-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5766856U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067700U (ja) * | 1983-10-17 | 1985-05-14 | 日新ハイボルテージ株式会社 | 荷電粒子加速装置 |
| JPH01248451A (ja) * | 1988-03-29 | 1989-10-04 | Nissin Electric Co Ltd | 多価イオン注入装置 |
-
1980
- 1980-10-08 JP JP14275680U patent/JPS5766856U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6067700U (ja) * | 1983-10-17 | 1985-05-14 | 日新ハイボルテージ株式会社 | 荷電粒子加速装置 |
| JPH01248451A (ja) * | 1988-03-29 | 1989-10-04 | Nissin Electric Co Ltd | 多価イオン注入装置 |