JPS5761184B2 - - Google Patents
Info
- Publication number
- JPS5761184B2 JPS5761184B2 JP51010151A JP1015176A JPS5761184B2 JP S5761184 B2 JPS5761184 B2 JP S5761184B2 JP 51010151 A JP51010151 A JP 51010151A JP 1015176 A JP1015176 A JP 1015176A JP S5761184 B2 JPS5761184 B2 JP S5761184B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1015176A JPS5293386A (en) | 1976-02-02 | 1976-02-02 | Flaw detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1015176A JPS5293386A (en) | 1976-02-02 | 1976-02-02 | Flaw detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5293386A JPS5293386A (en) | 1977-08-05 |
| JPS5761184B2 true JPS5761184B2 (US06262066-20010717-C00424.png) | 1982-12-23 |
Family
ID=11742265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1015176A Granted JPS5293386A (en) | 1976-02-02 | 1976-02-02 | Flaw detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5293386A (US06262066-20010717-C00424.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54110891A (en) * | 1978-02-17 | 1979-08-30 | Mitsubishi Electric Corp | Pattern flaw inspecting apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50107987A (US06262066-20010717-C00424.png) * | 1974-01-30 | 1975-08-25 |
-
1976
- 1976-02-02 JP JP1015176A patent/JPS5293386A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50107987A (US06262066-20010717-C00424.png) * | 1974-01-30 | 1975-08-25 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5293386A (en) | 1977-08-05 |
