JPS5758048B2 - - Google Patents
Info
- Publication number
- JPS5758048B2 JPS5758048B2 JP400976A JP400976A JPS5758048B2 JP S5758048 B2 JPS5758048 B2 JP S5758048B2 JP 400976 A JP400976 A JP 400976A JP 400976 A JP400976 A JP 400976A JP S5758048 B2 JPS5758048 B2 JP S5758048B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP400976A JPS5287989A (en) | 1976-01-19 | 1976-01-19 | Production of integrated circuits |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP400976A JPS5287989A (en) | 1976-01-19 | 1976-01-19 | Production of integrated circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5287989A JPS5287989A (en) | 1977-07-22 |
JPS5758048B2 true JPS5758048B2 (ja) | 1982-12-08 |
Family
ID=11572964
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP400976A Granted JPS5287989A (en) | 1976-01-19 | 1976-01-19 | Production of integrated circuits |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5287989A (ja) |
-
1976
- 1976-01-19 JP JP400976A patent/JPS5287989A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5287989A (en) | 1977-07-22 |