JPS5758023B2 - - Google Patents
Info
- Publication number
- JPS5758023B2 JPS5758023B2 JP51057806A JP5780676A JPS5758023B2 JP S5758023 B2 JPS5758023 B2 JP S5758023B2 JP 51057806 A JP51057806 A JP 51057806A JP 5780676 A JP5780676 A JP 5780676A JP S5758023 B2 JPS5758023 B2 JP S5758023B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780676A JPS52142580A (en) | 1976-05-21 | 1976-05-21 | Ion microanalyzer |
| US05/751,986 US4081674A (en) | 1976-01-21 | 1976-12-20 | Ion microprobe analyzer |
| DE2659385A DE2659385C3 (de) | 1976-01-21 | 1976-12-29 | Ionen-Mikrosonden-Analysator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5780676A JPS52142580A (en) | 1976-05-21 | 1976-05-21 | Ion microanalyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52142580A JPS52142580A (en) | 1977-11-28 |
| JPS5758023B2 true JPS5758023B2 (US20020095090A1-20020718-M00002.png) | 1982-12-07 |
Family
ID=13066152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5780676A Granted JPS52142580A (en) | 1976-01-21 | 1976-05-21 | Ion microanalyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52142580A (US20020095090A1-20020718-M00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0449075Y2 (US20020095090A1-20020718-M00002.png) * | 1987-04-22 | 1992-11-18 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
-
1976
- 1976-05-21 JP JP5780676A patent/JPS52142580A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0449075Y2 (US20020095090A1-20020718-M00002.png) * | 1987-04-22 | 1992-11-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52142580A (en) | 1977-11-28 |
