JPS5748980B2 - - Google Patents

Info

Publication number
JPS5748980B2
JPS5748980B2 JP11292074A JP11292074A JPS5748980B2 JP S5748980 B2 JPS5748980 B2 JP S5748980B2 JP 11292074 A JP11292074 A JP 11292074A JP 11292074 A JP11292074 A JP 11292074A JP S5748980 B2 JPS5748980 B2 JP S5748980B2
Authority
JP
Grant status
Grant
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11292074A
Other versions
JPS5139737A (en )
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

JP11292074A 1974-10-01 1974-10-01 Expired JPS5748980B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11292074A JPS5748980B2 (en) 1974-10-01 1974-10-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11292074A JPS5748980B2 (en) 1974-10-01 1974-10-01

Publications (2)

Publication Number Publication Date
JPS5139737A true JPS5139737A (en) 1976-04-02
JPS5748980B2 true JPS5748980B2 (en) 1982-10-19

Family

ID=14598780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11292074A Expired JPS5748980B2 (en) 1974-10-01 1974-10-01

Country Status (1)

Country Link
JP (1) JPS5748980B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985280U (en) * 1982-11-29 1984-06-08

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS584587B2 (en) * 1977-06-14 1983-01-27 Matsushita Electric Ind Co Ltd
JPS584588B2 (en) * 1977-06-30 1983-01-27 Matsushita Electric Ind Co Ltd
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
US4517752A (en) * 1983-06-27 1985-05-21 Machine Technology, Inc. Splash retarder
JPS60143871A (en) * 1983-12-28 1985-07-30 Toshiba Corp Coating device of resist
JPS6156414A (en) * 1984-08-28 1986-03-22 Fujitsu Ltd Spin coating method
US4587139A (en) * 1984-12-21 1986-05-06 International Business Machines Corporation Magnetic disk coating method and apparatus
JPS64737A (en) * 1987-03-27 1989-01-05 Toshiba Corp Applicator for resist
JPH084771B2 (en) * 1987-04-03 1996-01-24 東京エレクトロン株式会社 Coating apparatus and a coating method using the same
FR2636546B1 (en) * 1988-09-15 1991-03-15 Sulzer Electro Tech Method and apparatus for uniformly regular application of a layer of resin on a substrate
JP2603431B2 (en) * 1993-12-15 1997-04-23 東京応化工業株式会社 Coating apparatus
JP2588379B2 (en) * 1995-01-30 1997-03-05 東京エレクトロン株式会社 Coating apparatus
JP2697810B2 (en) * 1995-01-30 1998-01-14 東京エレクトロン株式会社 Coating method and coating apparatus for use therein

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985280U (en) * 1982-11-29 1984-06-08

Also Published As

Publication number Publication date Type
JP1158062C (en) grant
JPS5139737A (en) 1976-04-02 application

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