JPS5742970B2 - - Google Patents

Info

Publication number
JPS5742970B2
JPS5742970B2 JP14771475A JP14771475A JPS5742970B2 JP S5742970 B2 JPS5742970 B2 JP S5742970B2 JP 14771475 A JP14771475 A JP 14771475A JP 14771475 A JP14771475 A JP 14771475A JP S5742970 B2 JPS5742970 B2 JP S5742970B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14771475A
Other languages
Japanese (ja)
Other versions
JPS5271174A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14771475A priority Critical patent/JPS5271174A/ja
Publication of JPS5271174A publication Critical patent/JPS5271174A/ja
Publication of JPS5742970B2 publication Critical patent/JPS5742970B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP14771475A 1975-12-10 1975-12-10 Production of semiconductor device Granted JPS5271174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14771475A JPS5271174A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14771475A JPS5271174A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5271174A JPS5271174A (en) 1977-06-14
JPS5742970B2 true JPS5742970B2 (pm) 1982-09-11

Family

ID=15436532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14771475A Granted JPS5271174A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5271174A (pm)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5748249A (en) * 1980-09-08 1982-03-19 Nec Corp Semiconductor device
JPS5848459A (ja) * 1981-09-16 1983-03-22 Nec Corp 半導体装置
JPS58101454A (ja) * 1981-12-12 1983-06-16 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の電極
JPS60225464A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd イメ−ジセンサとその製造方法
JP2776807B2 (ja) * 1987-01-14 1998-07-16 株式会社日立製作所 半導体装置の製造方法
JP2544477B2 (ja) * 1989-03-31 1996-10-16 シャープ株式会社 窒化チタン膜形成方法
JP3243722B2 (ja) * 1990-10-24 2002-01-07 住友金属工業株式会社 薄膜の形成方法および半導体装置

Also Published As

Publication number Publication date
JPS5271174A (en) 1977-06-14

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