JPS5739050B2 - - Google Patents

Info

Publication number
JPS5739050B2
JPS5739050B2 JP901175A JP901175A JPS5739050B2 JP S5739050 B2 JPS5739050 B2 JP S5739050B2 JP 901175 A JP901175 A JP 901175A JP 901175 A JP901175 A JP 901175A JP S5739050 B2 JPS5739050 B2 JP S5739050B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP901175A
Other versions
JPS5183777A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP901175A priority Critical patent/JPS5739050B2/ja
Publication of JPS5183777A publication Critical patent/JPS5183777A/en
Publication of JPS5739050B2 publication Critical patent/JPS5739050B2/ja
Application status is Expired legal-status Critical

Links

JP901175A 1975-01-21 1975-01-21 Expired JPS5739050B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP901175A JPS5739050B2 (en) 1975-01-21 1975-01-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP901175A JPS5739050B2 (en) 1975-01-21 1975-01-21

Publications (2)

Publication Number Publication Date
JPS5183777A JPS5183777A (en) 1976-07-22
JPS5739050B2 true JPS5739050B2 (en) 1982-08-19

Family

ID=11708697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP901175A Expired JPS5739050B2 (en) 1975-01-21 1975-01-21

Country Status (1)

Country Link
JP (1) JPS5739050B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4048955A (en) * 1975-09-02 1977-09-20 Texas Instruments Incorporated Continuous chemical vapor deposition reactor
JPH0545054B2 (en) * 1986-01-27 1993-07-08 Hitachi Ltd
US5059770A (en) * 1989-09-19 1991-10-22 Watkins-Johnson Company Multi-zone planar heater assembly and method of operation

Also Published As

Publication number Publication date
JPS5183777A (en) 1976-07-22

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