JPS5728223A - Pyroelectric type radiation wave detector and manufacture thereof - Google Patents

Pyroelectric type radiation wave detector and manufacture thereof

Info

Publication number
JPS5728223A
JPS5728223A JP10289380A JP10289380A JPS5728223A JP S5728223 A JPS5728223 A JP S5728223A JP 10289380 A JP10289380 A JP 10289380A JP 10289380 A JP10289380 A JP 10289380A JP S5728223 A JPS5728223 A JP S5728223A
Authority
JP
Japan
Prior art keywords
film
electrode
manufacture
silicon
pellet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10289380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6212454B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Mikami
Chikao Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New Japan Radio Co Ltd
Japan Radio Co Ltd
Original Assignee
New Japan Radio Co Ltd
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by New Japan Radio Co Ltd, Japan Radio Co Ltd filed Critical New Japan Radio Co Ltd
Priority to JP10289380A priority Critical patent/JPS5728223A/ja
Publication of JPS5728223A publication Critical patent/JPS5728223A/ja
Publication of JPS6212454B2 publication Critical patent/JPS6212454B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point

Landscapes

  • Radiation Pyrometers (AREA)
JP10289380A 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof Granted JPS5728223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10289380A JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10289380A JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5728223A true JPS5728223A (en) 1982-02-15
JPS6212454B2 JPS6212454B2 (enrdf_load_stackoverflow) 1987-03-18

Family

ID=14339533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10289380A Granted JPS5728223A (en) 1980-07-26 1980-07-26 Pyroelectric type radiation wave detector and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5728223A (enrdf_load_stackoverflow)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913926A (ja) * 1982-07-15 1984-01-24 Matsushita Electric Ind Co Ltd 焦電素子
JPS5980923A (ja) * 1982-10-30 1984-05-10 株式会社島津製作所 焦電素子の製造法
JPS60119426A (ja) * 1983-12-01 1985-06-26 Murata Mfg Co Ltd 薄膜型焦電センサアレイ
JPS6136967A (ja) * 1984-07-30 1986-02-21 Matsushita Electric Ind Co Ltd 赤外線リニアアレイ素子およびその製造方法
JPS61187320A (ja) * 1985-02-15 1986-08-21 住友電気工業株式会社 強誘電体薄膜センサ−
JPS62269026A (ja) * 1986-05-16 1987-11-21 Anritsu Corp 輻射波検出素子とその製法
JPH0194227A (ja) * 1987-10-05 1989-04-12 Hamamatsu Photonics Kk 焦電検出装置とその製造方法
JPH0262923A (ja) * 1988-08-30 1990-03-02 Murata Mfg Co Ltd 焦電型赤外線センサ
EP0630058A3 (de) * 1993-05-19 1995-03-15 Siemens Ag Verfahren zur Herstellung einer Pyrodetektoranordnung durch elektronisches Ätzen eines Silizium Substrats.
US6329696B1 (en) 1997-06-11 2001-12-11 Nec Corporation Semiconductor device with electric converter element
KR100624026B1 (ko) 2003-09-10 2006-09-15 가부시키가이샤 시마즈세이사쿠쇼 방사선 검출기
US20100095497A1 (en) * 2004-11-23 2010-04-22 Samsung Electronics Co., Ltd. Monolithic duplexer
US20110115341A1 (en) * 2008-05-23 2011-05-19 Jeffrey Birkmeyer Insulated Film Use in a Mems Device
US20110179614A1 (en) * 2007-06-08 2011-07-28 Dai Nippon Printing Co., Ltd. Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5913926A (ja) * 1982-07-15 1984-01-24 Matsushita Electric Ind Co Ltd 焦電素子
JPS5980923A (ja) * 1982-10-30 1984-05-10 株式会社島津製作所 焦電素子の製造法
JPS60119426A (ja) * 1983-12-01 1985-06-26 Murata Mfg Co Ltd 薄膜型焦電センサアレイ
JPS6136967A (ja) * 1984-07-30 1986-02-21 Matsushita Electric Ind Co Ltd 赤外線リニアアレイ素子およびその製造方法
JPS61187320A (ja) * 1985-02-15 1986-08-21 住友電気工業株式会社 強誘電体薄膜センサ−
JPS62269026A (ja) * 1986-05-16 1987-11-21 Anritsu Corp 輻射波検出素子とその製法
JPH0194227A (ja) * 1987-10-05 1989-04-12 Hamamatsu Photonics Kk 焦電検出装置とその製造方法
JPH0262923A (ja) * 1988-08-30 1990-03-02 Murata Mfg Co Ltd 焦電型赤外線センサ
EP0630058A3 (de) * 1993-05-19 1995-03-15 Siemens Ag Verfahren zur Herstellung einer Pyrodetektoranordnung durch elektronisches Ätzen eines Silizium Substrats.
US6329696B1 (en) 1997-06-11 2001-12-11 Nec Corporation Semiconductor device with electric converter element
KR100624026B1 (ko) 2003-09-10 2006-09-15 가부시키가이샤 시마즈세이사쿠쇼 방사선 검출기
US20100095497A1 (en) * 2004-11-23 2010-04-22 Samsung Electronics Co., Ltd. Monolithic duplexer
US8720023B2 (en) * 2004-11-23 2014-05-13 Samsung Electronics Co., Ltd. Method of manufacturing a monolithic duplexer
US20110179614A1 (en) * 2007-06-08 2011-07-28 Dai Nippon Printing Co., Ltd. Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process
US8539655B2 (en) * 2007-06-08 2013-09-24 Dai Nippon Printing Co., Ltd. Fabrication process for a piezoelectric mirror device
US20110115341A1 (en) * 2008-05-23 2011-05-19 Jeffrey Birkmeyer Insulated Film Use in a Mems Device
US8857020B2 (en) * 2008-05-23 2014-10-14 Fujifilm Corporation Actuators and methods of making the same

Also Published As

Publication number Publication date
JPS6212454B2 (enrdf_load_stackoverflow) 1987-03-18

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