JPS5721830B2 - - Google Patents

Info

Publication number
JPS5721830B2
JPS5721830B2 JP6187973A JP6187973A JPS5721830B2 JP S5721830 B2 JPS5721830 B2 JP S5721830B2 JP 6187973 A JP6187973 A JP 6187973A JP 6187973 A JP6187973 A JP 6187973A JP S5721830 B2 JPS5721830 B2 JP S5721830B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6187973A
Other languages
Japanese (ja)
Other versions
JPS5011761A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6187973A priority Critical patent/JPS5721830B2/ja
Publication of JPS5011761A publication Critical patent/JPS5011761A/ja
Publication of JPS5721830B2 publication Critical patent/JPS5721830B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP6187973A 1973-06-04 1973-06-04 Expired JPS5721830B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6187973A JPS5721830B2 (cs) 1973-06-04 1973-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6187973A JPS5721830B2 (cs) 1973-06-04 1973-06-04

Publications (2)

Publication Number Publication Date
JPS5011761A JPS5011761A (cs) 1975-02-06
JPS5721830B2 true JPS5721830B2 (cs) 1982-05-10

Family

ID=13183850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6187973A Expired JPS5721830B2 (cs) 1973-06-04 1973-06-04

Country Status (1)

Country Link
JP (1) JPS5721830B2 (cs)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58165968U (ja) * 1982-04-30 1983-11-05 株式会社島津製作所 電子線走査型分析装置
JPS60236444A (ja) * 1985-05-10 1985-11-25 Hitachi Ltd 走査型反射電子回折顕微装置
JPS63284405A (ja) * 1987-05-18 1988-11-21 Hitachi Ltd 走査電子顕微鏡
JPH0748366B2 (ja) * 1988-07-29 1995-05-24 日本電子株式会社 集束イオンビーム注入装置
JP2590374B2 (ja) * 1988-11-30 1997-03-12 株式会社島津製作所 走査型電子顕微鏡付き材料試験機
JP4684623B2 (ja) * 2004-11-11 2011-05-18 鋼板剪断機械株式会社 吊上げ電磁石装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1441824A (en) * 1973-04-19 1976-07-07 Cambridge Scientific Instr Ltd Scanning electronbeam instrument

Also Published As

Publication number Publication date
JPS5011761A (cs) 1975-02-06

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