JPS57212436A - Composition of forming highly visible image before development following exposure to radiation - Google Patents
Composition of forming highly visible image before development following exposure to radiationInfo
- Publication number
- JPS57212436A JPS57212436A JP57099107A JP9910782A JPS57212436A JP S57212436 A JPS57212436 A JP S57212436A JP 57099107 A JP57099107 A JP 57099107A JP 9910782 A JP9910782 A JP 9910782A JP S57212436 A JPS57212436 A JP S57212436A
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- composition
- visible image
- image before
- following exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 206010073306 Exposure to radiation Diseases 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C7/00—Multicolour photographic processes or agents therefor; Regeneration of such processing agents; Photosensitive materials for multicolour processes
- G03C7/02—Direct bleach-out processes; Materials therefor; Preparing or processing such materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/273,819 US4348471A (en) | 1981-06-15 | 1981-06-15 | Positive acting composition yielding pre-development high visibility image after radiation exposure comprising acid free novolak, diazo oxide and acid sensitive dyestuff |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57212436A true JPS57212436A (en) | 1982-12-27 |
| JPH0227659B2 JPH0227659B2 (en:Method) | 1990-06-19 |
Family
ID=23045530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57099107A Granted JPS57212436A (en) | 1981-06-15 | 1982-06-09 | Composition of forming highly visible image before development following exposure to radiation |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4348471A (en:Method) |
| JP (1) | JPS57212436A (en:Method) |
| AU (1) | AU8448182A (en:Method) |
| CA (1) | CA1183036A (en:Method) |
| DE (1) | DE3222485A1 (en:Method) |
| FR (1) | FR2510770A1 (en:Method) |
| GB (1) | GB2102585B (en:Method) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61169836A (ja) * | 1985-01-22 | 1986-07-31 | Fuji Photo Film Co Ltd | 光可溶化組成物 |
| JPS62210443A (ja) * | 1986-02-27 | 1987-09-16 | バスフ アクチェン ゲゼルシャフト | 感光性記録素子 |
| JPS63236030A (ja) * | 1987-03-25 | 1988-09-30 | Japan Synthetic Rubber Co Ltd | 感放射線性樹脂組成物 |
| JPS63237053A (ja) * | 1987-03-26 | 1988-10-03 | Japan Synthetic Rubber Co Ltd | 集積回路作製用ポジ型感放射線性樹脂組成物 |
| JPH06148879A (ja) * | 1993-04-30 | 1994-05-27 | Japan Synthetic Rubber Co Ltd | ポジ型感放射線性樹脂組成物 |
| JPH06214384A (ja) * | 1993-04-30 | 1994-08-05 | Japan Synthetic Rubber Co Ltd | 1,2−キノンジアジドスルホン酸エステルの製造方法 |
| JPH0682188B2 (ja) * | 1987-03-19 | 1994-10-19 | ザイトロニクス,インコーポレイテツド | 紫外線被曝を可視化したフィルム及び紫外線被曝量測定部材 |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3144480A1 (de) * | 1981-11-09 | 1983-05-19 | Hoechst Ag, 6230 Frankfurt | Lichtempfindliches gemisch und daraus hergestelltes lichtempfindliches kopiermaterial |
| US4414314A (en) * | 1982-02-26 | 1983-11-08 | International Business Machines Corporation | Resolution in optical lithography |
| US4845008A (en) * | 1986-02-20 | 1989-07-04 | Fuji Photo Film Co., Ltd. | Light-sensitive positive working, o-guinone diazide presensitized plate with mixed solvent |
| DE3608492A1 (de) * | 1986-03-14 | 1987-09-17 | Hoechst Ag | Verfahren zum abtrennen von hoehermolekularen bestandteilen aus phenolpolymeren |
| JPH065384B2 (ja) * | 1986-06-12 | 1994-01-19 | 富士写真フイルム株式会社 | 感光性印刷版 |
| US4721665A (en) * | 1986-09-29 | 1988-01-26 | Polychrome Corporation | Method for neutralizing acidic novolak resin in a lithographic coating composition |
| GB2212933B (en) * | 1987-11-27 | 1991-10-16 | Tokyo Ohka Kogyo Co Ltd | A positive-working photoresist composition |
| US4937174A (en) * | 1988-02-24 | 1990-06-26 | Arizona Board Of Regents | Process of obtaining improved contrast in electron beam lithography |
| US4877716A (en) * | 1988-02-24 | 1989-10-31 | Arizona Board Of Regents | Developer solutions for PMMA electron resist |
| JPH04296754A (ja) * | 1991-03-26 | 1992-10-21 | Fuji Photo Film Co Ltd | ポジ型フオトレジスト組成物 |
| DE4214363C2 (de) * | 1991-04-30 | 1998-01-29 | Toshiba Kawasaki Kk | Strahlungsempfindliches Gemisch zur Ausbildung von Mustern |
| GB2277382A (en) * | 1993-04-19 | 1994-10-26 | Pan Graphics Ind Limited | Photoresist composition |
| US5330875A (en) * | 1993-05-05 | 1994-07-19 | Sun Chemical Corporation | Process for producing negative and positive original images on a bilevel printing plate utilizing non-silver halide layer and silver halide overlayer |
| US5948596A (en) * | 1997-05-27 | 1999-09-07 | Kodak Polychrome Graphics Llc | Digital printing plate comprising a thermal mask |
| US6187510B1 (en) | 1999-03-09 | 2001-02-13 | Kodak Polychrome Graphics Llc | Digital lithographic printing plate and method of making thereof |
| US6824879B2 (en) | 1999-06-10 | 2004-11-30 | Honeywell International Inc. | Spin-on-glass anti-reflective coatings for photolithography |
| JP2003502449A (ja) | 1999-06-10 | 2003-01-21 | ハネウエル・インターナシヨナル・インコーポレーテツド | フォトリソグラフィ用スピンオンガラス反射防止コーティング |
| US6268457B1 (en) | 1999-06-10 | 2001-07-31 | Allied Signal, Inc. | Spin-on glass anti-reflective coatings for photolithography |
| AU2002227106A1 (en) | 2001-11-15 | 2003-06-10 | Honeywell International Inc. | Spin-on anti-reflective coatings for photolithography |
| US8053159B2 (en) | 2003-11-18 | 2011-11-08 | Honeywell International Inc. | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof |
| US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
| US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
| JP6803842B2 (ja) | 2015-04-13 | 2020-12-23 | ハネウェル・インターナショナル・インコーポレーテッドHoneywell International Inc. | オプトエレクトロニクス用途のためのポリシロキサン製剤及びコーティング |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1363984A (fr) * | 1962-04-27 | 1964-06-19 | Minnesota Mining & Mfg | Feuille composite à revêtement diazoïque photo-sensible |
| FR1407899A (fr) * | 1963-07-12 | 1965-08-06 | Kalle Ag | Plaques d'impression sensibilisées préalablement par des o-naphtoquinone-diazides |
| GB1386586A (en) * | 1970-12-30 | 1975-03-12 | Kodak Ltd | Preparation of resist images |
| DE2331377C2 (de) * | 1973-06-20 | 1982-10-14 | Hoechst Ag, 6000 Frankfurt | Lichtempfindliches Kopiermaterial |
| US3925077A (en) * | 1974-03-01 | 1975-12-09 | Horizons Inc | Photoresist for holography and laser recording with bleachout dyes |
| US4148654A (en) * | 1976-07-22 | 1979-04-10 | Oddi Michael J | Positive acting photoresist comprising diazide ester, novolak resin and rosin |
| DE2641099A1 (de) * | 1976-09-13 | 1978-03-16 | Hoechst Ag | Lichtempfindliche kopierschicht |
| DE2641100C2 (de) * | 1976-09-13 | 1987-02-26 | Hoechst Ag, 6230 Frankfurt | Lichtempfindliches Gemisch |
| US4173470A (en) * | 1977-11-09 | 1979-11-06 | Bell Telephone Laboratories, Incorporated | Novolak photoresist composition and preparation thereof |
| JPS57163234A (en) * | 1981-04-01 | 1982-10-07 | Fuji Photo Film Co Ltd | Photosensitive composition |
-
1981
- 1981-06-15 US US06/273,819 patent/US4348471A/en not_active Expired - Lifetime
-
1982
- 1982-06-04 AU AU84481/82A patent/AU8448182A/en not_active Abandoned
- 1982-06-09 JP JP57099107A patent/JPS57212436A/ja active Granted
- 1982-06-14 CA CA000405094A patent/CA1183036A/en not_active Expired
- 1982-06-14 GB GB08217172A patent/GB2102585B/en not_active Expired
- 1982-06-15 DE DE19823222485 patent/DE3222485A1/de not_active Withdrawn
- 1982-06-15 FR FR8210558A patent/FR2510770A1/fr not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61169836A (ja) * | 1985-01-22 | 1986-07-31 | Fuji Photo Film Co Ltd | 光可溶化組成物 |
| JPS62210443A (ja) * | 1986-02-27 | 1987-09-16 | バスフ アクチェン ゲゼルシャフト | 感光性記録素子 |
| JPH0682188B2 (ja) * | 1987-03-19 | 1994-10-19 | ザイトロニクス,インコーポレイテツド | 紫外線被曝を可視化したフィルム及び紫外線被曝量測定部材 |
| JPS63236030A (ja) * | 1987-03-25 | 1988-09-30 | Japan Synthetic Rubber Co Ltd | 感放射線性樹脂組成物 |
| JPS63237053A (ja) * | 1987-03-26 | 1988-10-03 | Japan Synthetic Rubber Co Ltd | 集積回路作製用ポジ型感放射線性樹脂組成物 |
| JPH06148879A (ja) * | 1993-04-30 | 1994-05-27 | Japan Synthetic Rubber Co Ltd | ポジ型感放射線性樹脂組成物 |
| JPH06214384A (ja) * | 1993-04-30 | 1994-08-05 | Japan Synthetic Rubber Co Ltd | 1,2−キノンジアジドスルホン酸エステルの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US4348471A (en) | 1982-09-07 |
| DE3222485A1 (de) | 1982-12-30 |
| GB2102585A (en) | 1983-02-02 |
| FR2510770A1 (fr) | 1983-02-04 |
| GB2102585B (en) | 1985-09-04 |
| AU8448182A (en) | 1982-12-23 |
| JPH0227659B2 (en:Method) | 1990-06-19 |
| CA1183036A (en) | 1985-02-26 |
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