Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP9899478ApriorityCriticalpatent/JPS5526634A/ja
Publication of JPS5526634ApublicationCriticalpatent/JPS5526634A/ja
Publication of JPS5719854B2publicationCriticalpatent/JPS5719854B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/302—Controlling tubes by external information, e.g. programme control
