JPS57194050U - - Google Patents

Info

Publication number
JPS57194050U
JPS57194050U JP8220181U JP8220181U JPS57194050U JP S57194050 U JPS57194050 U JP S57194050U JP 8220181 U JP8220181 U JP 8220181U JP 8220181 U JP8220181 U JP 8220181U JP S57194050 U JPS57194050 U JP S57194050U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8220181U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8220181U priority Critical patent/JPS57194050U/ja
Publication of JPS57194050U publication Critical patent/JPS57194050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Measuring Cells (AREA)
  • Drying Of Semiconductors (AREA)
JP8220181U 1981-06-05 1981-06-05 Pending JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8220181U JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-05 1981-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8220181U JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-05 1981-06-05

Publications (1)

Publication Number Publication Date
JPS57194050U true JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-09

Family

ID=29877682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8220181U Pending JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-06-05 1981-06-05

Country Status (1)

Country Link
JP (1) JPS57194050U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336532A (ja) * 1986-07-30 1988-02-17 Tokyo Electron Ltd 光導入窓の曇防止装置
JPH0669172A (ja) * 1992-12-25 1994-03-11 Tokyo Electron Ltd 光窓の曇防止装置およびプラズマ処理装置
JP2006313847A (ja) * 2005-05-09 2006-11-16 Hitachi High-Technologies Corp プラズマ発光測定システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336532A (ja) * 1986-07-30 1988-02-17 Tokyo Electron Ltd 光導入窓の曇防止装置
JPH0669172A (ja) * 1992-12-25 1994-03-11 Tokyo Electron Ltd 光窓の曇防止装置およびプラズマ処理装置
JP2006313847A (ja) * 2005-05-09 2006-11-16 Hitachi High-Technologies Corp プラズマ発光測定システム

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