JPS57192091K1 - - Google Patents

Info

Publication number
JPS57192091K1
JPS57192091K1 JP7601881A JP7601881A JPS57192091K1 JP S57192091 K1 JPS57192091 K1 JP S57192091K1 JP 7601881 A JP7601881 A JP 7601881A JP 7601881 A JP7601881 A JP 7601881A JP S57192091 K1 JPS57192091 K1 JP S57192091K1
Authority
JP
Grant status
Grant
Patent type
Prior art keywords
package
electrode
discharge
equipping
enable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7601881A
Other versions
JPS57192091A (en )
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01SDEVICES USING STIMULATED EMISSION
    • H01S3/00Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves
    • H01S3/02Constructional details
    • H01S3/03Constructional details of gas laser discharge tubes
    • H01S3/038Electrodes, e.g. special shape, configuration or composition

Abstract

PURPOSE:To enable to perform regulation of uniform electric discharge confirming operation of discharge, and moreover to enable to perform reregulation easily enabling to be used again even when ununiform electric discharge is generated by friction at a gas laser tube by a method wherein the equipping position of a bar type electrode to a package is made as variable. CONSTITUTION:The bar type electrode 3 is equipped to the package 1 by a constituted body consisting of screws 10 of plural number for regulation of position to enable to regulate insertion depth and the inclination of the electrode in the package 1 freely, a flange 11 to be inserted screws therein, and a flexible metal bellows 12. As a result, the electrode 3 is enabled to be regulated freely as to make the gap between a facing discharge electrode to be regulated in relation to the equipping face of package by the position regulating screws 10. Moreover the inclination in relation to the equipping face of package can be regulated freely, and correction of ununiformity of parallel discharge between the adjoining electrode can be attained.
JP7601881A 1981-05-20 1981-05-20 Pending JPS57192091K1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7601881A JPS57192091K1 (en) 1981-05-20 1981-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7601881A JPS57192091K1 (en) 1981-05-20 1981-05-20

Publications (2)

Publication Number Publication Date
JPS57192091A true JPS57192091A (en) 1982-11-26
JPS57192091K1 true JPS57192091K1 (en) 1982-11-26

Family

ID=13593085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7601881A Pending JPS57192091K1 (en) 1981-05-20 1981-05-20

Country Status (1)

Country Link
JP (1) JPS57192091K1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2137796A1 (en) * 2007-04-16 2009-12-30 Cymer, Inc. Extendable electrode for gas discharge laser

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2673821B2 (en) * 1988-09-29 1997-11-05 株式会社小松製作所 Excimer laser device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2137796A1 (en) * 2007-04-16 2009-12-30 Cymer, Inc. Extendable electrode for gas discharge laser

Also Published As

Publication number Publication date Type
JPS57192091A (en) 1982-11-26 application

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