JPS57191727U - - Google Patents

Info

Publication number
JPS57191727U
JPS57191727U JP7969681U JP7969681U JPS57191727U JP S57191727 U JPS57191727 U JP S57191727U JP 7969681 U JP7969681 U JP 7969681U JP 7969681 U JP7969681 U JP 7969681U JP S57191727 U JPS57191727 U JP S57191727U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7969681U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7969681U priority Critical patent/JPS57191727U/ja
Publication of JPS57191727U publication Critical patent/JPS57191727U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)
JP7969681U 1981-05-29 1981-05-29 Pending JPS57191727U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7969681U JPS57191727U (enrdf_load_stackoverflow) 1981-05-29 1981-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7969681U JPS57191727U (enrdf_load_stackoverflow) 1981-05-29 1981-05-29

Publications (1)

Publication Number Publication Date
JPS57191727U true JPS57191727U (enrdf_load_stackoverflow) 1982-12-04

Family

ID=29875283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7969681U Pending JPS57191727U (enrdf_load_stackoverflow) 1981-05-29 1981-05-29

Country Status (1)

Country Link
JP (1) JPS57191727U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132832A (ja) * 1983-12-20 1985-07-15 Tokico Ltd 基板搬送装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51116454A (en) * 1975-04-05 1976-10-13 Rheon Autom Mach Co Ltd A tray carry-in and out device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51116454A (en) * 1975-04-05 1976-10-13 Rheon Autom Mach Co Ltd A tray carry-in and out device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60132832A (ja) * 1983-12-20 1985-07-15 Tokico Ltd 基板搬送装置

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