JPS5718702B2 - - Google Patents

Info

Publication number
JPS5718702B2
JPS5718702B2 JP8688475A JP8688475A JPS5718702B2 JP S5718702 B2 JPS5718702 B2 JP S5718702B2 JP 8688475 A JP8688475 A JP 8688475A JP 8688475 A JP8688475 A JP 8688475A JP S5718702 B2 JPS5718702 B2 JP S5718702B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8688475A
Other languages
Japanese (ja)
Other versions
JPS5210673A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8688475A priority Critical patent/JPS5210673A/en
Publication of JPS5210673A publication Critical patent/JPS5210673A/en
Publication of JPS5718702B2 publication Critical patent/JPS5718702B2/ja
Granted legal-status Critical Current

Links

JP8688475A 1975-07-15 1975-07-15 Manufacturing method of silicon semi-conductor device Granted JPS5210673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8688475A JPS5210673A (en) 1975-07-15 1975-07-15 Manufacturing method of silicon semi-conductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8688475A JPS5210673A (en) 1975-07-15 1975-07-15 Manufacturing method of silicon semi-conductor device

Publications (2)

Publication Number Publication Date
JPS5210673A JPS5210673A (en) 1977-01-27
JPS5718702B2 true JPS5718702B2 (en) 1982-04-17

Family

ID=13899248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8688475A Granted JPS5210673A (en) 1975-07-15 1975-07-15 Manufacturing method of silicon semi-conductor device

Country Status (1)

Country Link
JP (1) JPS5210673A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648133A (en) * 1979-09-26 1981-05-01 Nec Corp Manufacture of semiconductor device
US4648175A (en) * 1985-06-12 1987-03-10 Ncr Corporation Use of selectively deposited tungsten for contact formation and shunting metallization

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918578A (en) * 1972-06-14 1974-02-19
JPS4964369A (en) * 1972-10-23 1974-06-21
JPS50113169A (en) * 1973-10-29 1975-09-05

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4918578A (en) * 1972-06-14 1974-02-19
JPS4964369A (en) * 1972-10-23 1974-06-21
JPS50113169A (en) * 1973-10-29 1975-09-05

Also Published As

Publication number Publication date
JPS5210673A (en) 1977-01-27

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