JPS5718702B2 - - Google Patents
Info
- Publication number
- JPS5718702B2 JPS5718702B2 JP8688475A JP8688475A JPS5718702B2 JP S5718702 B2 JPS5718702 B2 JP S5718702B2 JP 8688475 A JP8688475 A JP 8688475A JP 8688475 A JP8688475 A JP 8688475A JP S5718702 B2 JPS5718702 B2 JP S5718702B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8688475A JPS5210673A (en) | 1975-07-15 | 1975-07-15 | Manufacturing method of silicon semi-conductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8688475A JPS5210673A (en) | 1975-07-15 | 1975-07-15 | Manufacturing method of silicon semi-conductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5210673A JPS5210673A (en) | 1977-01-27 |
JPS5718702B2 true JPS5718702B2 (en) | 1982-04-17 |
Family
ID=13899248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8688475A Granted JPS5210673A (en) | 1975-07-15 | 1975-07-15 | Manufacturing method of silicon semi-conductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5210673A (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5648133A (en) * | 1979-09-26 | 1981-05-01 | Nec Corp | Manufacture of semiconductor device |
US4648175A (en) * | 1985-06-12 | 1987-03-10 | Ncr Corporation | Use of selectively deposited tungsten for contact formation and shunting metallization |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918578A (en) * | 1972-06-14 | 1974-02-19 | ||
JPS4964369A (en) * | 1972-10-23 | 1974-06-21 | ||
JPS50113169A (en) * | 1973-10-29 | 1975-09-05 |
-
1975
- 1975-07-15 JP JP8688475A patent/JPS5210673A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4918578A (en) * | 1972-06-14 | 1974-02-19 | ||
JPS4964369A (en) * | 1972-10-23 | 1974-06-21 | ||
JPS50113169A (en) * | 1973-10-29 | 1975-09-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS5210673A (en) | 1977-01-27 |