JPS57161556A - Voltage measuring device using electron beam - Google Patents

Voltage measuring device using electron beam

Info

Publication number
JPS57161556A
JPS57161556A JP56047106A JP4710681A JPS57161556A JP S57161556 A JPS57161556 A JP S57161556A JP 56047106 A JP56047106 A JP 56047106A JP 4710681 A JP4710681 A JP 4710681A JP S57161556 A JPS57161556 A JP S57161556A
Authority
JP
Japan
Prior art keywords
decelerating
electrode
voltage
analysis
leading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56047106A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0252828B2 (enrdf_load_stackoverflow
Inventor
Akio Ito
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56047106A priority Critical patent/JPS57161556A/ja
Publication of JPS57161556A publication Critical patent/JPS57161556A/ja
Publication of JPH0252828B2 publication Critical patent/JPH0252828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Tests Of Electronic Circuits (AREA)
JP56047106A 1981-03-30 1981-03-30 Voltage measuring device using electron beam Granted JPS57161556A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56047106A JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56047106A JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Publications (2)

Publication Number Publication Date
JPS57161556A true JPS57161556A (en) 1982-10-05
JPH0252828B2 JPH0252828B2 (enrdf_load_stackoverflow) 1990-11-14

Family

ID=12765916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56047106A Granted JPS57161556A (en) 1981-03-30 1981-03-30 Voltage measuring device using electron beam

Country Status (1)

Country Link
JP (1) JPS57161556A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221660A (ja) * 1984-09-03 1986-10-02 Nec Corp 電子ビ−ム測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61221660A (ja) * 1984-09-03 1986-10-02 Nec Corp 電子ビ−ム測定装置

Also Published As

Publication number Publication date
JPH0252828B2 (enrdf_load_stackoverflow) 1990-11-14

Similar Documents

Publication Publication Date Title
US3626184A (en) Detector system for a scanning electron microscope
US2418029A (en) Electron probe analysis employing X-ray spectrography
GB1447983A (en) Detector for electron microscopes
JPS5516321A (en) Electrostatic radiant type electronic gun
GB2021789A (en) Monitoring voltage using an electron beam probe
JPS57161556A (en) Voltage measuring device using electron beam
JPS5619856A (en) Electron-ray device
JP2607573B2 (ja) イオンマイクロアナライザ
JPS556737A (en) Scan electron microscope
JPS5693339A (en) Function test device of integrated circuit
JPS5727554A (en) Tetrode mass spectrograph
JPH0570898B2 (enrdf_load_stackoverflow)
JPS571957A (en) Device for limiting charge on surface of solid
JPH0341402Y2 (enrdf_load_stackoverflow)
SU1265887A1 (ru) Устройство дл регистрации неупругоотраженных электронов в растровом электронном микроскопе
SU830597A1 (ru) Способ детектировани сигналаВ PACTPOBOM элЕКТРОННОМ МиКРОСКОпЕ
JPS56134462A (en) Electron beam system
JPS5772073A (en) Voltage measuring device
SU363904A1 (enrdf_load_stackoverflow)
RU2001464C1 (ru) Устройство дл анализа молекул рных пучков
JPS60113136A (ja) Ｘ線光電子分析装置
JPS5636056A (en) Measuring system for surface electric potential
FR2410290A1 (fr) Detecteur panoramique d'ions
JPS5557248A (en) Scanned electron image observing apparatus
JPS5636058A (en) Measuring system for surface electric potential