JPS57155746A - Support structure of collet - Google Patents

Support structure of collet

Info

Publication number
JPS57155746A
JPS57155746A JP4033481A JP4033481A JPS57155746A JP S57155746 A JPS57155746 A JP S57155746A JP 4033481 A JP4033481 A JP 4033481A JP 4033481 A JP4033481 A JP 4033481A JP S57155746 A JPS57155746 A JP S57155746A
Authority
JP
Japan
Prior art keywords
collet
arm
spring
shaft
collet shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4033481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329825B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Mimata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4033481A priority Critical patent/JPS57155746A/ja
Publication of JPS57155746A publication Critical patent/JPS57155746A/ja
Publication of JPS6329825B2 publication Critical patent/JPS6329825B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
JP4033481A 1981-03-23 1981-03-23 Support structure of collet Granted JPS57155746A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4033481A JPS57155746A (en) 1981-03-23 1981-03-23 Support structure of collet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4033481A JPS57155746A (en) 1981-03-23 1981-03-23 Support structure of collet

Publications (2)

Publication Number Publication Date
JPS57155746A true JPS57155746A (en) 1982-09-25
JPS6329825B2 JPS6329825B2 (enrdf_load_stackoverflow) 1988-06-15

Family

ID=12577719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4033481A Granted JPS57155746A (en) 1981-03-23 1981-03-23 Support structure of collet

Country Status (1)

Country Link
JP (1) JPS57155746A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011656A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-06
JPS5056877A (enrdf_load_stackoverflow) * 1973-09-14 1975-05-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011656A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-06
JPS5056877A (enrdf_load_stackoverflow) * 1973-09-14 1975-05-17

Also Published As

Publication number Publication date
JPS6329825B2 (enrdf_load_stackoverflow) 1988-06-15

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