JPS57152468A - Formation of thin film - Google Patents

Formation of thin film

Info

Publication number
JPS57152468A
JPS57152468A JP3670881A JP3670881A JPS57152468A JP S57152468 A JPS57152468 A JP S57152468A JP 3670881 A JP3670881 A JP 3670881A JP 3670881 A JP3670881 A JP 3670881A JP S57152468 A JPS57152468 A JP S57152468A
Authority
JP
Japan
Prior art keywords
thin film
resist
pattern
film
oxide compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3670881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332869B2 (enrdf_load_stackoverflow
Inventor
Yozo Nishiura
Yoshikazu Nishiwaki
Toshiki Ehata
Miki Kuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP3670881A priority Critical patent/JPS57152468A/ja
Publication of JPS57152468A publication Critical patent/JPS57152468A/ja
Publication of JPS6332869B2 publication Critical patent/JPS6332869B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP3670881A 1981-03-13 1981-03-13 Formation of thin film Granted JPS57152468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3670881A JPS57152468A (en) 1981-03-13 1981-03-13 Formation of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3670881A JPS57152468A (en) 1981-03-13 1981-03-13 Formation of thin film

Publications (2)

Publication Number Publication Date
JPS57152468A true JPS57152468A (en) 1982-09-20
JPS6332869B2 JPS6332869B2 (enrdf_load_stackoverflow) 1988-07-01

Family

ID=12477265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3670881A Granted JPS57152468A (en) 1981-03-13 1981-03-13 Formation of thin film

Country Status (1)

Country Link
JP (1) JPS57152468A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6332869B2 (enrdf_load_stackoverflow) 1988-07-01

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