JPS57146329U - - Google Patents

Info

Publication number
JPS57146329U
JPS57146329U JP3293681U JP3293681U JPS57146329U JP S57146329 U JPS57146329 U JP S57146329U JP 3293681 U JP3293681 U JP 3293681U JP 3293681 U JP3293681 U JP 3293681U JP S57146329 U JPS57146329 U JP S57146329U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3293681U
Other languages
Japanese (ja)
Other versions
JPS6339960Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3293681U priority Critical patent/JPS6339960Y2/ja
Publication of JPS57146329U publication Critical patent/JPS57146329U/ja
Application granted granted Critical
Publication of JPS6339960Y2 publication Critical patent/JPS6339960Y2/ja
Expired legal-status Critical Current

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  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP3293681U 1981-03-09 1981-03-09 Expired JPS6339960Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3293681U JPS6339960Y2 (enrdf_load_stackoverflow) 1981-03-09 1981-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3293681U JPS6339960Y2 (enrdf_load_stackoverflow) 1981-03-09 1981-03-09

Publications (2)

Publication Number Publication Date
JPS57146329U true JPS57146329U (enrdf_load_stackoverflow) 1982-09-14
JPS6339960Y2 JPS6339960Y2 (enrdf_load_stackoverflow) 1988-10-19

Family

ID=29830315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3293681U Expired JPS6339960Y2 (enrdf_load_stackoverflow) 1981-03-09 1981-03-09

Country Status (1)

Country Link
JP (1) JPS6339960Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002537644A (ja) * 1999-02-18 2002-11-05 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002537644A (ja) * 1999-02-18 2002-11-05 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプラインにおける重合ｔｅｏｓ堆積抑制のための方法及び装置
JP4828024B2 (ja) * 1999-02-18 2011-11-30 エムケイエス インスツルメンツ，インコーポレイテッド 真空ポンプライン中の重合ｔｅｏｓ堆積抑制のための方法及びｔｅｏｓトラップ

Also Published As

Publication number Publication date
JPS6339960Y2 (enrdf_load_stackoverflow) 1988-10-19

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