JPS57144551A - Washing tool fixing mechanism - Google Patents

Washing tool fixing mechanism

Info

Publication number
JPS57144551A
JPS57144551A JP3030781A JP3030781A JPS57144551A JP S57144551 A JPS57144551 A JP S57144551A JP 3030781 A JP3030781 A JP 3030781A JP 3030781 A JP3030781 A JP 3030781A JP S57144551 A JPS57144551 A JP S57144551A
Authority
JP
Japan
Prior art keywords
washing
tool
fixing plates
washing tool
fixing mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3030781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6136222B2 (https=
Inventor
Masataka Hisamichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3030781A priority Critical patent/JPS57144551A/ja
Publication of JPS57144551A publication Critical patent/JPS57144551A/ja
Publication of JPS6136222B2 publication Critical patent/JPS6136222B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP3030781A 1981-03-03 1981-03-03 Washing tool fixing mechanism Granted JPS57144551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3030781A JPS57144551A (en) 1981-03-03 1981-03-03 Washing tool fixing mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3030781A JPS57144551A (en) 1981-03-03 1981-03-03 Washing tool fixing mechanism

Publications (2)

Publication Number Publication Date
JPS57144551A true JPS57144551A (en) 1982-09-07
JPS6136222B2 JPS6136222B2 (https=) 1986-08-16

Family

ID=12300108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3030781A Granted JPS57144551A (en) 1981-03-03 1981-03-03 Washing tool fixing mechanism

Country Status (1)

Country Link
JP (1) JPS57144551A (https=)

Also Published As

Publication number Publication date
JPS6136222B2 (https=) 1986-08-16

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