JPS57132123U - - Google Patents

Info

Publication number
JPS57132123U
JPS57132123U JP1981018251U JP1825181U JPS57132123U JP S57132123 U JPS57132123 U JP S57132123U JP 1981018251 U JP1981018251 U JP 1981018251U JP 1825181 U JP1825181 U JP 1825181U JP S57132123 U JPS57132123 U JP S57132123U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981018251U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981018251U priority Critical patent/JPS57132123U/ja
Publication of JPS57132123U publication Critical patent/JPS57132123U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Duct Arrangements (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1981018251U 1981-02-13 1981-02-13 Pending JPS57132123U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981018251U JPS57132123U (enrdf_load_stackoverflow) 1981-02-13 1981-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981018251U JPS57132123U (enrdf_load_stackoverflow) 1981-02-13 1981-02-13

Publications (1)

Publication Number Publication Date
JPS57132123U true JPS57132123U (enrdf_load_stackoverflow) 1982-08-17

Family

ID=29816222

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981018251U Pending JPS57132123U (enrdf_load_stackoverflow) 1981-02-13 1981-02-13

Country Status (1)

Country Link
JP (1) JPS57132123U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147057A (ja) * 1984-08-13 1986-03-07 Toshiba Corp 低圧水銀蒸気放電灯
JPH0868554A (ja) * 1994-08-30 1996-03-12 Sanki Eng Co Ltd ダウンフロー式クリーンルーム
JPH11173646A (ja) * 1997-12-10 1999-07-02 Mitsubishi Heavy Ind Ltd 空調用吹出しグリル
WO2004023046A1 (ja) * 2002-09-03 2004-03-18 Tokyo Electron Limited 半導体処理システム用の気体清浄化装置
JP2020061538A (ja) * 2018-10-12 2020-04-16 國立臺北科技大學 層流装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6147057A (ja) * 1984-08-13 1986-03-07 Toshiba Corp 低圧水銀蒸気放電灯
JPH0868554A (ja) * 1994-08-30 1996-03-12 Sanki Eng Co Ltd ダウンフロー式クリーンルーム
JPH11173646A (ja) * 1997-12-10 1999-07-02 Mitsubishi Heavy Ind Ltd 空調用吹出しグリル
WO2004023046A1 (ja) * 2002-09-03 2004-03-18 Tokyo Electron Limited 半導体処理システム用の気体清浄化装置
JP2020061538A (ja) * 2018-10-12 2020-04-16 國立臺北科技大學 層流装置

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