JPS5712307B2 - - Google Patents
Info
- Publication number
- JPS5712307B2 JPS5712307B2 JP16552679A JP16552679A JPS5712307B2 JP S5712307 B2 JPS5712307 B2 JP S5712307B2 JP 16552679 A JP16552679 A JP 16552679A JP 16552679 A JP16552679 A JP 16552679A JP S5712307 B2 JPS5712307 B2 JP S5712307B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16552679A JPS5688358A (en) | 1979-12-21 | 1979-12-21 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16552679A JPS5688358A (en) | 1979-12-21 | 1979-12-21 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5688358A JPS5688358A (en) | 1981-07-17 |
| JPS5712307B2 true JPS5712307B2 (en) | 1982-03-10 |
Family
ID=15814060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16552679A Granted JPS5688358A (en) | 1979-12-21 | 1979-12-21 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5688358A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759379A (en) * | 1980-09-27 | 1982-04-09 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPH0612777B2 (en) * | 1985-04-11 | 1994-02-16 | ロ−ム株式会社 | Method for manufacturing semiconductor device |
| JPH0638422B2 (en) * | 1985-04-11 | 1994-05-18 | ロ−ム株式会社 | Method for manufacturing semiconductor device |
| JP2501317B2 (en) * | 1985-04-11 | 1996-05-29 | ローム 株式会社 | Method for manufacturing semiconductor device |
| JPS6314475A (en) * | 1986-07-04 | 1988-01-21 | Nec Corp | Manufacture of semiconductor device |
| JPS63205959A (en) * | 1987-02-21 | 1988-08-25 | Matsushita Electric Works Ltd | Manufacture of electrostatic induction semiconductor device |
-
1979
- 1979-12-21 JP JP16552679A patent/JPS5688358A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5688358A (en) | 1981-07-17 |