JPS57117696U - - Google Patents
Info
- Publication number
- JPS57117696U JPS57117696U JP402681U JP402681U JPS57117696U JP S57117696 U JPS57117696 U JP S57117696U JP 402681 U JP402681 U JP 402681U JP 402681 U JP402681 U JP 402681U JP S57117696 U JPS57117696 U JP S57117696U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Structure Of Printed Boards (AREA)
- Lead Frames For Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981004026U JPS6234479Y2 (https=) | 1981-01-14 | 1981-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981004026U JPS6234479Y2 (https=) | 1981-01-14 | 1981-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57117696U true JPS57117696U (https=) | 1982-07-21 |
| JPS6234479Y2 JPS6234479Y2 (https=) | 1987-09-02 |
Family
ID=29802465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981004026U Expired JPS6234479Y2 (https=) | 1981-01-14 | 1981-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6234479Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015376A (ja) * | 2011-07-01 | 2013-01-24 | Tokyo Electron Ltd | 基板処理装置のデータ取得方法及びセンサ用基板 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49113162A (https=) * | 1973-03-06 | 1974-10-29 | ||
| JPS5529274U (https=) * | 1978-08-17 | 1980-02-26 |
-
1981
- 1981-01-14 JP JP1981004026U patent/JPS6234479Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49113162A (https=) * | 1973-03-06 | 1974-10-29 | ||
| JPS5529274U (https=) * | 1978-08-17 | 1980-02-26 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013015376A (ja) * | 2011-07-01 | 2013-01-24 | Tokyo Electron Ltd | 基板処理装置のデータ取得方法及びセンサ用基板 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6234479Y2 (https=) | 1987-09-02 |