JPS57112052A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57112052A JPS57112052A JP18722280A JP18722280A JPS57112052A JP S57112052 A JPS57112052 A JP S57112052A JP 18722280 A JP18722280 A JP 18722280A JP 18722280 A JP18722280 A JP 18722280A JP S57112052 A JPS57112052 A JP S57112052A
- Authority
- JP
- Japan
- Prior art keywords
- upper layer
- layer wiring
- wiring
- bridge
- projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Abstract
PURPOSE:To facilitate the removal of a bridge produced at the gap of a multilayer wiring, by providing a projection between regions where a lower layer wiring crosses two upper layer wirings, and photo-etching the upper layer wiring which remains at the end of projection after the formation of upper layer wiring. CONSTITUTION:For instance, a lower layer wiring 4 is formed on a field film 2 of element-formed substrate 1 in a shape that provides a horizontal projection 11 between regions where the wiring 4 is due to cross two upper layer wiring 8. Next, the upper layer wiring 8 is formed via an interlayer film 5, and a resist film 9 is coated. An opening 12 is provided at the end of a bridge 6 formed along the projection 11. Next, the end of bridge 6' is removed after etching evenly with etching material for the upper layer wiring 8. The resist film 9 is removed and the multilayer wiring structure is made. This facilitates removal of the bridge 6' and prevents the upper layer wiring 8 from over-etching. This also improves the yield and reliability of multilayer wiring.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18722280A JPS57112052A (en) | 1980-12-29 | 1980-12-29 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18722280A JPS57112052A (en) | 1980-12-29 | 1980-12-29 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57112052A true JPS57112052A (en) | 1982-07-12 |
JPS6161699B2 JPS6161699B2 (en) | 1986-12-26 |
Family
ID=16202201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18722280A Granted JPS57112052A (en) | 1980-12-29 | 1980-12-29 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57112052A (en) |
-
1980
- 1980-12-29 JP JP18722280A patent/JPS57112052A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6161699B2 (en) | 1986-12-26 |
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