JPS5688371A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS5688371A JPS5688371A JP16475379A JP16475379A JPS5688371A JP S5688371 A JPS5688371 A JP S5688371A JP 16475379 A JP16475379 A JP 16475379A JP 16475379 A JP16475379 A JP 16475379A JP S5688371 A JPS5688371 A JP S5688371A
- Authority
- JP
- Japan
- Prior art keywords
- region
- films
- film
- substrate
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16475379A JPS5688371A (en) | 1979-12-20 | 1979-12-20 | Semiconductor pressure converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16475379A JPS5688371A (en) | 1979-12-20 | 1979-12-20 | Semiconductor pressure converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5688371A true JPS5688371A (en) | 1981-07-17 |
Family
ID=15799257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16475379A Pending JPS5688371A (en) | 1979-12-20 | 1979-12-20 | Semiconductor pressure converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5688371A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251673A (ja) * | 1984-05-28 | 1985-12-12 | Fujikura Ltd | 半導体圧力センサの製造方法 |
JPS61154179A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
-
1979
- 1979-12-20 JP JP16475379A patent/JPS5688371A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60251673A (ja) * | 1984-05-28 | 1985-12-12 | Fujikura Ltd | 半導体圧力センサの製造方法 |
JPH0369187B2 (ja) * | 1984-05-28 | 1991-10-31 | Fujikura Ltd | |
JPS61154179A (ja) * | 1984-12-27 | 1986-07-12 | Nec Corp | 圧力センサ |
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