JPS5680016A - Method of paralleling bonding tool - Google Patents
Method of paralleling bonding toolInfo
- Publication number
- JPS5680016A JPS5680016A JP15788279A JP15788279A JPS5680016A JP S5680016 A JPS5680016 A JP S5680016A JP 15788279 A JP15788279 A JP 15788279A JP 15788279 A JP15788279 A JP 15788279A JP S5680016 A JPS5680016 A JP S5680016A
- Authority
- JP
- Japan
- Prior art keywords
- plane
- bonding tool
- reflected
- telescope
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable the paralleling of a bonding tool to be made accurately in a short time by detecting the image reflected by the plane of the bonding tool and the image reflected by parallel plane lens by means of a telescope and correcting the inclination of the plane of said tool.
CONSTITUTION: A light source 4a, a shielding plate 4b, an objective lens 4c, and an eyepiece 4d are provided on the optical axis 4e of a telescope 4. The reflected image 4a' of the light source 4a made by the plane 1a of a bonding tool 1 and the reflection surface 5a of a plane mirror 5, and the reflected image 4a" of the light source 4a made by the under surface 3a of the parallel plane lens 2 on a wafer setting surface 3 and the reflection surface 5a of the plane mirror 5 are detected with the telescope 4, and the inclination of the plane 1a of the bonding tool is corrected in such a manner that the directions of the two reflected images 4a', 4a" align, then the plane 1a of the bonding tool and the wafer setting surface 3 are set accurately parallel.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15788279A JPS5680016A (en) | 1979-12-05 | 1979-12-05 | Method of paralleling bonding tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15788279A JPS5680016A (en) | 1979-12-05 | 1979-12-05 | Method of paralleling bonding tool |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5680016A true JPS5680016A (en) | 1981-07-01 |
Family
ID=15659468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15788279A Pending JPS5680016A (en) | 1979-12-05 | 1979-12-05 | Method of paralleling bonding tool |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5680016A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145353A (en) * | 1975-06-09 | 1976-12-14 | Masayoshi Yoshimura | Angle measuring device |
-
1979
- 1979-12-05 JP JP15788279A patent/JPS5680016A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145353A (en) * | 1975-06-09 | 1976-12-14 | Masayoshi Yoshimura | Angle measuring device |
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