JPS5680016A - Method of paralleling bonding tool - Google Patents

Method of paralleling bonding tool

Info

Publication number
JPS5680016A
JPS5680016A JP15788279A JP15788279A JPS5680016A JP S5680016 A JPS5680016 A JP S5680016A JP 15788279 A JP15788279 A JP 15788279A JP 15788279 A JP15788279 A JP 15788279A JP S5680016 A JPS5680016 A JP S5680016A
Authority
JP
Japan
Prior art keywords
plane
bonding tool
reflected
telescope
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15788279A
Other languages
Japanese (ja)
Inventor
Hideo Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP15788279A priority Critical patent/JPS5680016A/en
Publication of JPS5680016A publication Critical patent/JPS5680016A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the paralleling of a bonding tool to be made accurately in a short time by detecting the image reflected by the plane of the bonding tool and the image reflected by parallel plane lens by means of a telescope and correcting the inclination of the plane of said tool.
CONSTITUTION: A light source 4a, a shielding plate 4b, an objective lens 4c, and an eyepiece 4d are provided on the optical axis 4e of a telescope 4. The reflected image 4a' of the light source 4a made by the plane 1a of a bonding tool 1 and the reflection surface 5a of a plane mirror 5, and the reflected image 4a" of the light source 4a made by the under surface 3a of the parallel plane lens 2 on a wafer setting surface 3 and the reflection surface 5a of the plane mirror 5 are detected with the telescope 4, and the inclination of the plane 1a of the bonding tool is corrected in such a manner that the directions of the two reflected images 4a', 4a" align, then the plane 1a of the bonding tool and the wafer setting surface 3 are set accurately parallel.
COPYRIGHT: (C)1981,JPO&Japio
JP15788279A 1979-12-05 1979-12-05 Method of paralleling bonding tool Pending JPS5680016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15788279A JPS5680016A (en) 1979-12-05 1979-12-05 Method of paralleling bonding tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15788279A JPS5680016A (en) 1979-12-05 1979-12-05 Method of paralleling bonding tool

Publications (1)

Publication Number Publication Date
JPS5680016A true JPS5680016A (en) 1981-07-01

Family

ID=15659468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15788279A Pending JPS5680016A (en) 1979-12-05 1979-12-05 Method of paralleling bonding tool

Country Status (1)

Country Link
JP (1) JPS5680016A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145353A (en) * 1975-06-09 1976-12-14 Masayoshi Yoshimura Angle measuring device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145353A (en) * 1975-06-09 1976-12-14 Masayoshi Yoshimura Angle measuring device

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