JPS5678142A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5678142A
JPS5678142A JP15456279A JP15456279A JPS5678142A JP S5678142 A JPS5678142 A JP S5678142A JP 15456279 A JP15456279 A JP 15456279A JP 15456279 A JP15456279 A JP 15456279A JP S5678142 A JPS5678142 A JP S5678142A
Authority
JP
Japan
Prior art keywords
mask
layer
ions
implanted
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15456279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6154257B2 (enrdf_load_stackoverflow
Inventor
Junji Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15456279A priority Critical patent/JPS5678142A/ja
Publication of JPS5678142A publication Critical patent/JPS5678142A/ja
Publication of JPS6154257B2 publication Critical patent/JPS6154257B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP15456279A 1979-11-29 1979-11-29 Manufacture of semiconductor device Granted JPS5678142A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15456279A JPS5678142A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15456279A JPS5678142A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5678142A true JPS5678142A (en) 1981-06-26
JPS6154257B2 JPS6154257B2 (enrdf_load_stackoverflow) 1986-11-21

Family

ID=15586951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15456279A Granted JPS5678142A (en) 1979-11-29 1979-11-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5678142A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02297043A (ja) * 1989-05-12 1990-12-07 Funai Electric Co Ltd ヘッドシリンダの結露検出装置

Also Published As

Publication number Publication date
JPS6154257B2 (enrdf_load_stackoverflow) 1986-11-21

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