JPS5651228B2 - - Google Patents
Info
- Publication number
- JPS5651228B2 JPS5651228B2 JP16127778A JP16127778A JPS5651228B2 JP S5651228 B2 JPS5651228 B2 JP S5651228B2 JP 16127778 A JP16127778 A JP 16127778A JP 16127778 A JP16127778 A JP 16127778A JP S5651228 B2 JPS5651228 B2 JP S5651228B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3178—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for applying thin layers on objects
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU782568105A SU796248A1 (en) | 1978-01-31 | 1978-01-31 | Device for coating |
SU782593106A SU1125291A2 (en) | 1978-03-30 | 1978-03-30 | Apparatus for application of coatings |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54110988A JPS54110988A (en) | 1979-08-30 |
JPS5651228B2 true JPS5651228B2 (en) | 1981-12-03 |
Family
ID=26665654
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16127778A Granted JPS54110988A (en) | 1978-01-31 | 1978-12-28 | Coating vacuum evaporation apparatus |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS54110988A (en) |
DE (1) | DE2902142C2 (en) |
FR (1) | FR2416273A1 (en) |
IT (1) | IT1101076B (en) |
SE (1) | SE431473B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1040631A1 (en) * | 1980-06-25 | 1983-09-07 | Предприятие П/Я В-8851 | Vacuum arc apparatus |
GB2106545B (en) * | 1981-02-23 | 1985-06-26 | Rimma Ivanovna Stupak | Consumable cathode for electric-arc evaporator of metal |
CH657242A5 (en) * | 1982-03-22 | 1986-08-15 | Axenov Ivan I | ARC PLASMA SOURCE AND ARC SYSTEM WITH SUCH AN ARC PLASMA SOURCE FOR PLASMA TREATMENT OF THE SURFACE OF WORKPIECES. |
GB2140040B (en) * | 1983-05-09 | 1986-09-17 | Vac Tec Syst | Evaporation arc stabilization |
DE3331707A1 (en) * | 1983-09-02 | 1985-03-21 | Leybold-Heraeus GmbH, 5000 Köln | METHOD AND DEVICE FOR REACTIVELY SPRAYING CONNECTIONS FROM METALS AND SEMICONDUCTORS |
FR2557822B1 (en) * | 1984-01-11 | 1987-10-16 | Instr I | CUTTING TOOL AND METHOD FOR MANUFACTURING SAID TOOL |
US4724058A (en) * | 1984-08-13 | 1988-02-09 | Vac-Tec Systems, Inc. | Method and apparatus for arc evaporating large area targets |
DE3615361C2 (en) * | 1986-05-06 | 1994-09-01 | Santos Pereira Ribeiro Car Dos | Device for the surface treatment of workpieces |
DE19600993A1 (en) * | 1995-01-13 | 1996-08-08 | Technics Plasma Gmbh | Appts. for high rate anodic evapn. for substrate coating |
DE10044419C1 (en) * | 2000-09-08 | 2002-05-02 | Infineon Technologies Ag | Shading ring for plasma coating systems and its use |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481780A (en) * | 1977-12-13 | 1979-06-29 | Futaba Denshi Kogyo Kk | Ion plating device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3305473A (en) * | 1964-08-20 | 1967-02-21 | Cons Vacuum Corp | Triode sputtering apparatus for depositing uniform coatings |
US3329601A (en) * | 1964-09-15 | 1967-07-04 | Donald M Mattox | Apparatus for coating a cathodically biased substrate from plasma of ionized coatingmaterial |
US3369990A (en) * | 1964-12-31 | 1968-02-20 | Ibm | Cathodic sputtering apparatus including thermionic means for increasing sputtering efficiency |
US3625848A (en) * | 1968-12-26 | 1971-12-07 | Alvin A Snaper | Arc deposition process and apparatus |
US3749662A (en) * | 1972-04-17 | 1973-07-31 | Materials Research Corp | Heated substrate support station for sputtering systems |
US4038171A (en) * | 1976-03-31 | 1977-07-26 | Battelle Memorial Institute | Supported plasma sputtering apparatus for high deposition rate over large area |
-
1978
- 1978-12-28 JP JP16127778A patent/JPS54110988A/en active Granted
- 1978-12-29 IT IT31436/78A patent/IT1101076B/en active
- 1978-12-29 SE SE7813467A patent/SE431473B/en not_active IP Right Cessation
-
1979
- 1979-01-19 DE DE2902142A patent/DE2902142C2/en not_active Expired
- 1979-01-30 FR FR7902330A patent/FR2416273A1/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5481780A (en) * | 1977-12-13 | 1979-06-29 | Futaba Denshi Kogyo Kk | Ion plating device |
Also Published As
Publication number | Publication date |
---|---|
FR2416273B1 (en) | 1981-11-06 |
IT1101076B (en) | 1985-09-28 |
FR2416273A1 (en) | 1979-08-31 |
SE431473B (en) | 1984-02-06 |
DE2902142A1 (en) | 1979-08-16 |
SE7813467L (en) | 1979-08-01 |
JPS54110988A (en) | 1979-08-30 |
IT7831436A0 (en) | 1978-12-29 |
DE2902142C2 (en) | 1983-03-17 |